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Linear Stage LS-110
 

Key features UPGRADE

now availabe with a travel range up to 305 mm

...more info

Linear Stage LS-110 UPGRADE

 

Micro Stage MTS-65
 

Key features UPGRADE

now availabe with a travel range up to 52 mm

...more info

Micro Stage MTS-65 UPGRADE

Rotation Stage DT-50
 

Key features

Load capacity up to 1 kg
Integrated reference switches
Clear aperture 20 mm
Rotation Range 360°, endless
...more info

Rotation Stage DT-50

 

Micro Pusher MP-21
 

Key features

Travel range 12 and 25 mm
Bi-directional repeatability down to +/- 0.5 μm
Uni-directional repeatability down to +/- 0.2 μm
Resolution 2.5 µm (Full Stepp)
Other resolutions and accuracies available
upon request
Maximum speed 5 mm/sec
Fy up to 40 N
1x Integrated limit switches
Weight (kg) 0.06

Micro Pusher MP-21

 

Translation Stage VT-21
 

Key features

Travel range 10 and 25 mm
Load. up to 1 kg
Resolution 0.1 µm
Repeatability: < +/- 2µm (uni-directional)
Repeatability: < +/- 5 µm (bi-directional)
Max. speed: 5 mm/sec
Vacuum version available
x-y and x-y-z mounting available
Integrated limit switches
Weight (kg) 0.08

Translation Stage VT-21

 

SM-series SM-32
 

Key features
New Product, PCI-card, Point to Point Motion, Linear Interpolation

3 Axes Microstep Controller System
Microsteps down to 1/64 (software configuration)
Plug in PC card for PCI slot
Amplifier on board, 12 V bus, external max 24 V
36W max. power, 1,5 V per axis
Trajectory generation with on board processor
Fast PCI bus communication
DLL´s for all Windows (TM) versions, DOS
...more info

SM-series SM-32

 

Piezo Motor Amplifier PMA-100
  Key features

Single axis piezo motor (inertial or stick-slip) driver
Interfaces directly with a stepper motor controller
Standard pulse and direction interface
Typical open loop step resolution of 1.5 nm
Typical maximum velocity of 5 mm/s
No setup or adjustments required
Universal power supply included
...more info

Piezo Motor Adapter PMA-100

 

Piezo Motor Controller/Driver
PMC-100
  Key features

Single axis piezo motor (inertial or stick-slip)
controller/driver
Typical open loop step resolution of 1.5 nm
Speed can be changed on the fly
Closed loop version available
Typical maximum velocity of 5 mm/s
No setup or adjustments required
Universal power supply included
Controller is supplied with LabVIEW VI & Win DLL
Compact package size 1.85” x 1.85x 1.6”
...more info

Piezo Motor Adapter PMA-100

 

Elevation Stage ES-70
 Key features

Travel range 6.25 mm
Bi-directional repeatability down to +/- 1 μm
Maximum speed 0.14 mm/sec
Load capacity up to 2 kg
Integrated limit switches
Linear re-circulating ball system
Option: Vacuum up to UHV
Elevation Stage ES-70

 

Linear Stage VT-75
 Key features

Travel range up to 650 mm
Bi-directional repeatability down to +/- 4 μm
Maximum speed 100 mm/sec
Load capacity up to 5 kg
Integrated limit switches
Linear re-circulating ball system
Option: Vacuum up to FV,
XYZ-mounting
Linear Stage VT-75

 

Linear Stage VT-40
 Key features

TTravel range up to 100 mm
Bi-directional repeatability down to +/- 4 μm
Maximum speed 100 mm/sec
Load capacity up to 1 kg
Integrated limit switches
Linear re-circulating ball system
Option: Vacuum up to FV,
XYZ-mounting
Linear Stage VT-40

 

Linear Motor Stage LMS-60 80 100
 Key features

Linear Motor
Travel range up to 1000 mm
Uni-directional repeatability down to +/- 0.05 μm
Maximum speed 500 mm/sec
Load capacity up to 20 kg
Integrated limit switches
Integrated linear scale (center mounted)
Linear re-circulating ball system
Option: Vacuum up to FV
XY-mounting
Linear Motor Stage LMS-60 80 100

 

Linear Stage LS-270
 Key features

Travel range up to 1016 mm
Uni-directional repeatability down to +/- 0.05 μm
Maximum speed 150 mm/sec
Load capacity up to 150 kg
Integrated limit switches
Optionally: linear scale (center mounted)
Cross-roller bearings
Option: Vacuum up to UHV,
XYZ-mounting
Linear Stage LS-270

 

Linear Stage LS-300
 Key features

Travel range up to 815 mm
Uni-directional repeatability down to +/- 0.1 μm
Maximum speed 150 mm/sec
Load capacity up to 100 kg
Integrated limit switches
Optionally: linear scale (center mounted)
Linear re-circulating ball system
Option: Vacuum up to UHV,
XYZ-mounting
Linear Stage LS-300

 

Rotation Stage DT-25 (M)
 

Key features

DT-25
Maximum speed 1.5 °/sec
DT-25 (M)
Drive: driveworm
Range: 360° endless
Aperture: 12.5 mm
Gear: ~74:1
Load: Fx: 2 N, Fz: 5 N

Rotation Stage DT-25 (M)

 

Tip-Tilt Stage TT-65
 

Key features

Integrated limit switches

Tip-Tilt Stage TT-65

 

Torque Rotation Stage TRS-65
 Key features

Torque Motor
Travel range 45°
Uni-directional repeatability down to +/- 0.25 m°
Maximum speed 360 °/sec
Load capacity up to 0.5 kg
Integrated reference switches
Integrated angular scale
Ball bearings
Torque Rotation Stage TRS-65

 

Precision Rotation Stage PRS-200
 Key features

Uni-directional repeatability down to +/- 0.25 m°
Maximum speed 120 °/sec
Load capacity up to 50 kg
Integrated reference switches
Optionally: angular scale
Clear aperture 120 mm
Preloaded worm drive for zero backlash
Cross-roller bearings
Precision Rotation Stage PRS-200

 

Ultra Precision R. S. UPR-270 AIR
 Key features

Torque Motor
Uni-directional repeatability down to +/- 0.1 m°
Maximum speed 360 °/sec
Load capacity up to 40 kg
Integrated reference switches
Integrated angular scale
High precision air bearings
Flatness and eccentricity < 0.1 μm
Wobble < 2.5 μrad
Option: Clean room
Ultra Precision R. S. UPR-270 AIR

 

Ultra Precision R. S. UPR-270
 Key features

Torque Motor
Uni-directional repeatability down to +/- 0.1 m°
Maximum speed 360 °/sec
Load capacity up to 80 kg
Integrated reference switches
Integrated angular scale
High-precision ball bearings
Ultra Precision R. S. UPR-270

 

 DOWNLOAD NOW - MiniCatalog 2007 ... 7.002kb    
 
Mini|Catalog 2007
 
 
Welcome to the "precision made in germany"
For your first orientiation we designed this
NEW Edition Mini | Catalog with more details!
FORMAT   DIN-B5   120 PAGES   DIAG 

 

 

 
Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.
 
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