D E S C R I P T I O N

Nano Rotation Stages NRS-series are mainly employed for modern electronic production and laser application. Combined with other stages of MICOS high-dynamic precise positioning systems can be configured resulting in an efficient production. Nano Rotation Stages NRS-series are driven by piezo motors. They are controlled by closed loop modus. The measuring system with very high accuracy is installed near the guides. Especially significant is a very quiet and dynamic smooth move. Nano Rotation Stages of the NRS-series are available with controllers and integrated procress hardware and software or they can be purchased with our high resolution encoders and amplifiers, ready for connection to OEM and customer controllers. Stages can be offered for clean room and vacuum ( up to 10e-10 Torr ) application.