Ultra Precision Linear Stage UPM-160

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MICOS GMBH • FREIBURGER STRASSE 30 • DE- 79427 ESCHBACH • PHONE + 49 7634 5057 230 • FAX + 49 7634 5057 393

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	2.010		Ultra Precision Linear Stage UPM-160

Key features

	Travel range up to 205 mm (8")

	Bi-directional repeatability +/- 0.1 µm

	Linear scale centrally mounted

	Load capacity in lifetime

	Maximum speed 100 mm/sec

	Crossed-roller bearings

	Strength stress-relieved Aluminium

	Load capacity up to 100 kg

	20.000 hour MTBF

	Module combination

F A C T S
Load Characteristics	Fx (N)	Fy (N)	Fz (N)	Mx (Nm)	My (Nm)	Mz (Nm)	kax (µrad/Nm)	kay (µrad/Nm)
DC-B-040	150	100	350	100	200	100	5	3
2Phase-051	150	100	350	100	200	100	5	3

D E S C R I P T I O N

The Ultra Precision Linear Stage UPM-160 of the structural series 160 is especially employed for the Wafer Sub Surface Inspection, Fiber Alignments, High Precision Robotic and for all tasks where a maximum of positioning accuracy and reliability is absolutely necessary. All Ultra-Precision-Linear Stages UPM-160 are equipped with a linear length linear system that is centrally installed between the guide. Due to high-quality crossed-roller bearings a maximum of load capacity and smooth move is guaranteed. A special, stressfree, tempered AL-alloy guarantees a homogeneous non-warping structure. The structural series 160 are offered with 2-phase-micro-step (SMC-series) technology or with DC-motor-tacho combination. System accuracy of less than 1µm/100mm respectively a

bi-directional repeatability of 0.1µm is guaranteed. All UPM-160 components are standard fitted out with two mechanical limit switches. Additionally contactless limit switches can be mounted. The positioning accuracy of the structural series 160 is only guaranteed with MICOS control systems. The Ultra-Precision-Linear Stages are supplied calibrated with standard certificate (flatness, straightness & position). The measurement is made mounted and unloaded on granite with a flatness < 1µm.

Technical data
Travel Range (mm)	55	105	155	205
Bi-directional Repeatability (µm)	+/- 0.1
Accuracy per 50 mm (µm)	+/- *0.25 ... 0.5
Velocity Range (mm/sec)	0.001 ... 100
Straightness / Flatness (µm)	< +/- 0.5	< +/- 0.75	< +/- 1	< +/- 1.25
Pitch (µrad)	< +/- 15	< +/- 20	< +/- 25	< +/- 30
Yaw (µrad)	< +/- 20
Ballscrew Pitch (mm)	2.5 \| 5.0

Speed max. 2.5 \| 5.0 mm pitch (mm/sec)
DC-B-040	50 \| 100
2Phase-051	20 \| 35

Resolution Closed-Loop (µm)
LS-010, Linear steel scale	0.1
LS-020, Linear glass scale	0.005 ... 0.1

Current (Amps) / Voltage (Volts)
DC-B-040	3.8 \| 24
2Phase-051	2.5 \| -

Material	Special Alu, black anodized
Weight (kg)	5	6	7	8
More info: Detailed information, concerning motor and connectors, see: Appendix *=Two point slope correction

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UPM-160 Motors

	DC-B-040	2Phase-051

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UPM-160 Base

Travel ranges	A (mm)	B (mm)	C (mm)
55 mm	110.5	211	27.5
105 mm	135.5	261	52.5
155 mm	160.5	311	77.5
205 mm	185.5	361	102.5

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

UPM-160 Ordering information

DC-B-040 2Phase-051	1 2

55 mm (2") 105 mm (4") 155 mm (6") 205 mm (8")	1 2 3 4

LS-010, Linear steel scale LS-020, Linear glass scale	1 2

pitch / 2.5 mm pitch / 5.0 mm	1 2

	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.

DC-B-040

2Phase-051