MICOS USA - Positioners - Linear Motion

Positioners

Controllers

Special Environments

Products & Solutions POSITIONERSLinear Motion

LINEAR MOTION

X-Stages
X-Y Stages
Z Stages
Actuators

	Ultra Precision Linear Stage UPM-160 Travel: 205 mm Max. Load: 15 kg Max. Speed: 100 mm/sec Max. Resolution: 0.001 μm Repeatability: 0.035 μm uni-directional +/- 0.035 μm bi-directional Linear Encoder: Optional
	Ultra Precision Stage UPS-150 Travel: 52 - 305 mm Max. Load: 15 kg Max. Speed: 600 mm/sec Max. Resolution: 0.001 μm Repeatability: 0.015 μm uni-directional +/- 0.025 μm bi-directional Linear Encoder: Optional
	High Precision Stage HPS-170 Travel: 52 - 305 mm Max. Load: 35 kg Max. Speed: 90 mm/sec Max. Resolution: 0.05 μm Repeatability: 0.05 μm uni-directional +/- 0.05 μm bi-directional Linear Encoder: Optional
	Linear Stage LS-270 Travel: 155 - 1016mm Max. Load: 150 kg Max. Speed: 150 mm/sec Max. Resolution: 0.05 μm Repeatability: 0.05 μm uni-directional +/- 0.04 μm bi-directional Linear Encoder: Optional
	Linear Motor Stage LMS-300 Travel: 415 - 815 mm Max. Load: 100 kg Max. Speed: 800 mm/sec Max. Resolution: 0.005 μm Repeatability: 0.05 μm uni-directional +/- 0.05 μm bi-directional Linear Encoder: Included
	Linear Motor Stage LMS-230 Travel: 52 mm Max. Load: 15 kg Max. Speed: 400 mm/sec Max. Resolution: 0.001 μm Repeatability: 0.01 μm uni-directional +/- 0.02 μm bi-directional Linear Encoder: Included
	Linear Motor Stage LMS-180 Travel: 155 - 508 mm Max. Load: 45 kg Max. Speed: 500 mm/sec Max. Resolution: 0.015 μm Repeatability: 0.05 μm uni-directional +/- 0.1 μm bi-directional Linear Encoder: Included
	Linear Stage LS-180 Travel: 155 - 508 mm Max. Load: 100 kg Max. Speed: 200 mm/sec Max. Resolution: 0.05 μm Repeatability: 0.05 μm uni-directional +/- 0.1 μm bi-directional Linear Encoder: Optional
	Linear Motor Stage LMS-120 Travel: 40 mm Max. Load: 4 kg Max. Speed: 200 mm/sec Max. Resolution: 0.015 μm Repeatability: 0.03 μm uni-directional +/- 0.05 μm bi-directional Linear Encoder: Included
	Linear Stage LS-120 Travel: 40 mm Max. Load: 10 kg Max. Speed: 90mm/sec Max. Resolution: 0.05 μm Repeatability: 0.1 μm uni-directional +/- 0.1 μm bi-directionally Linear Encoder: Optional
	Linear Stage LS-110 Travel: 26 - 305 mm Max. Load: 10 kg Max. Speed: 90 mm/sec Max. Resolution: 0.05 μm Repeatability: 0.1 μm uni-directional +/- 0.1 μm bi-directional Linear Encoder: Optional
	Linear Motor Stage LMS-100 Travel: 200 - 1000 mm Max. Load: 20 kg Max. Speed: 500 mm/sec Max. Resolution: 0.015 μm Repeatability: 0.1 μm uni-directional +/- 0.1 μm bi-directional Linear Encoder: Optional
	Linear Motor Stage LMS-80 Travel: 120 mm Max. Load: 5 kg Max. Speed: 500 mm/sec Max. Resolution: 0.015 μm Repeatability: 0.1 μm uni-directional +/- 0.1 μm bi-directional Linear Encoder: Included
	Linear Motor Stage LMS-60 Travel: 25 - 65 mm Max. Load: 3 kg Max. Speed: 500 mm/sec Max. Resolution: 0.015 μm Repeatability: 0.1 μm uni-directional +/- 0.1 μm bi-directional Linear Encoder: Included
	Precision Linear Stage PLS-85 Travel: 26 - 102 mm Max. Load: 10 kg Max. Speed: 100 mm/sec Max. Resolution: 0.05 μm Repeatability: 0.05 μm uni-directional +/- 0.1 μm bi-directional Linear Encoder: Optional
	Linear Stage LS-65 Travel: 26 - 102 mm Max. Load: 6 kg Max. Speed: 10 mm/sec Max. Resolution: 0.2 μm Repeatability: 0.3 μm uni-directional +/- 5 μm bi-directional Linear Encoder: Not Available
	Micro Stage MTS-65 Travel: 13 - 52 mm Max. Load: 2 kg Max. Speed: 10 mm/sec Max. Resolution: 0.05 μm Repeatability: 0.1 μm uni-directional +/- 0.2 μm bi-directional Linear Encoder: Optional
	Micro Stage MTS-70 Travel: 10 mm Max. Load: 2 kg Max. Speed: 8 mm/sec Max. Resolution: 0.05 μm Repeatability: 0.1 μm uni-directional +/- 0.2 μm bi-directional Linear Encoder: Optional
	Linear Stage VT-75 Travel: 50 - 600mm Max. Load: 5 kg Max. Speed: 100 mm/sec Max. Resolution: 0.4 μm Repeatability: 0.4 μm uni-directional +/- 0.6 μm bi-directional Linear Encoder: Not Available
	Linear Stage VT-40 Travel: 30 - 100 mm Max. Load: 1 kg Max. Speed: 150 mm/sec Max. Resolution: 0.4 μm Repeatability: 0.4 μm uni-directional +/- 4 μm bi-directional Linear Encoder: Not Available
	Translation Stage VT-80 Travel: 25 - 300 mm Max. Load: 5 kg Max. Speed: 20 mm/sec Max. Resolution: 0.2 μm Repeatability: 0.4 μm uni-directional +/- 10 μm bi-directional Linear Encoder: Not Available
	Linear Stage LS-40 Travel: 13 - 52 mm Max. Load: 2 kg Max. Speed: 5 mm/sec Max. Resolution: 0.1 μm Repeatability: 0.1 μm uni-directional +/- 3 μm bi-directional Linear Encoder: Not Available
	Translation Stage VT-21 L Travel: 26 mm Max. Load: 1 kg Max. Speed: 5 mm/sec Max. Resolution: 0.05 μm Repeatability: 0.5 μm uni-directional +/- 4 μm bi-directional Linear Encoder: Optional
	Translation Stage VT-21 S Travel: 10 mm Max. Load: 1 kg Max. Speed: 5 mm/sec Max. Resolution: 0.05 μm Repeatability: 0.5 μm uni-directional +/- 4 μm bi-directional Linear Encoder: Optional
	Micro Stage MT-55 Travel: 5 mm Max. Load: 0.8 kg Max. Speed: 1 mm/sec Max. Resolution: 0.2 μm Repeatability: 0.2 μm uni-directional +/- 4 μm bi-directional Linear Encoder: Not Available

	Cross Stage CS-430 Travel: 350 x 300 mm Max. Load: 30 kg Max. Speed: 100 mm/sec Max. Resolution: 0.05 μm Repeatability: 0.1 μm uni-directional +/- 0.1 μm bi-directional Linear Encoder: Optional
	Scan Table MS-8 Travel: 205 x 205mm Max. Load: 4 kg Max. Speed: 90 mm/sec Max. Resolution: 0.05 μm Repeatability: 0.25 μm uni-directional +/- 0.5 μm bi-directional Linear Encoder: Optional
	Scan Table MS-4 Travel: 102 x 102 mm Max. Load: 3 kg Max. Speed: 90 mm/sec Max. Resolution: 0.05 μm Repeatability: 0.25 μm uni-directional +/- 0.5 μm bi-directional Linear Encoder: Optional
	Scan Table KT-120 Travel: 26 x 26 mm Max. Load: 5 kg Max. Speed: 3.5 mm/sec Max. Resolution: 0.2 μm Repeatability: 2 μm uni-directional +/- 5 μm bi-directional Linear Encoder: Not Available

	Nano Precision Elevation Stage NPE-200 Travel: 13 mm Max. Load: 30 kg Max. Speed: 0.2 mm/sec Max. Resolution: 0.001 μm Repeatability: 0.04 μm uni-directional +/- 0.4 μm bi-directional Linear Encoder: Optional
	Ultra Precision Elevation Stage UPL-160 Travel: 26 mm Max. Load: 30kg Max. Speed: 30 mm/sec Max. Resolution: 0.001 μm Repeatability: 0.03 μm uni-directional +/- 0.035 μm bi-directional Linear Encoder: Optional
	Elevation Stage ES-100 Travel: 13 - 26 mm Max. Load: 5.5 kg Max. Speed: 20 mm/sec Max. Resolution: 0.05 μm Repeatability: 0.05 μm uni-directional +/- 0.1 μm bi-directional Linear Encoder: Optional
	Elevation Stage ES-82 Travel: 13 - 26 mm Max. Load: 5.5 kg Max. Speed: 20 mm/sec Max. Resolution: 0.05 μm Repeatability: 0.05 μm uni-directional +/- 0.01 μm bi-directional Linear Encoder: Optional
	Elevation Stage ES-70 Travel: 6.25 mm Max. Load: 2 kg Max. Speed: 0.1 mm/sec Max. Resolution: 0.3 μm Repeatability: 0.3 μm uni-directional +/- 2 μm bi-directional Linear Encoder: Not Available
	Elevation Stage ES-65 Travel: 26 mm Max. Load: 2 kg Max. Speed: 20 mm/sec Max. Resolution: 1 μm Repeatability: 5 μm uni-directional +/- 2 μm bi-directional Linear Encoder: Not Available
	Elevation Stage ES-50 Travel: 10 mm Max. Load: 1 kg Max. Speed: 5 mm/sec Max. Resolution: 0.05 μm Repeatability: 0.1 μm uni-directional +/- 0.1 μm bi-directional Linear Encoder: Optional

	Micro Actuator MA-35 Travel: 52 mm Max. Force: 500 kg Max. Speed: 100 mm/sec Max. Resolution: 0.1 μm Repeatability: 0.2 μm uni-directional +/- 1 μm bi-directional Linear Encoder: Not Available
	Micro Pusher MP-20 L Travel: 75 mm Max. Force: 125 N Max. Speed: 3.5 mm/sec Max. Resolution: 0.1 μm Repeatability: 0.3 μm uni-directional +/- 1 μm bi-directional Linear Encoder: Not Available
	Micro Pusher MP-20 S Travel: 12.5 mm Max. Force: 20 N Max. Speed: 3 mm/sec Max. Resolution: 0.5 μm Repeatability: 2 μm uni-directional +/- 5 μm bi-directional Linear Encoder: Not Available
	Micro Pusher MP-21 Travel: 12 - 25 mm Max. Force: 40 N Max. Speed: 5 mm/sec Max. Resolution: 0.05 μm Repeatability: 0.4 μm uni-directional +/- 0.5 μm bi-directional Linear Encoder: Not Avialable
	Micro Pusher MP-15 Travel: 6 - 12.7 mm Max. Force: 10 N Max. Speed: 0.3 mm/sec Max. Resolution: 0.2 μm Repeatability: 0.5 μm uni-directional +/- 10 μm bi-directional Linear Encoder: Not Available