NANO POSITIONING - PIEZO

 

  • Linear Piezo Stages
  • Rotary Piezo Stages

Piezo Positioner PP-20

  • Travel: 11 mm
  • Max. Load: 1 kg
  • Blocking Force: 2 N
  • Max. Speed: 2 mm/sec
  • Max. Resolution: < 1 nm
  • Repeatability: not specified in open loop

Piezo Positioner PP-22

  • Travel: 12 mm
  • Max. Load: 1 kg
  • Max. Speed: 2 mm/sec
  • Max. Resolution: < 1 nm
  • Repeatability: 10 nm uni-directional
                           +/- 10 nm bi-directional
  • Linear Encoder: Optional

Piezo Positioner Cross Stage PPX-32

  • Travel: 18 x 18 mm
  • Max. Load: 1 kg
  • Max. Speed: 2 mm/sec
  • Max. Resolution: < 1 nm
  • Repeatability: 10 nm uni-directional
                           +/- 10 nm bi-directional
  • Linear Encoder: Optional

Piezo Positioner PP-30

  • Travel: 8 - 30 mm
  • Max. Load: 0.8 kg
  • Max. Speed: 2 mm/sec
  • Max. Resolution: 1.5 nm
  • Repeatability: 10 nm uni-directional
                            +/- 10 nm bi-directional
  • Linear Encoder: Optional

Linear Piezo Stage LPS-35

  • Travel: 6.5 - 38 mm
  • Max. Load: 0.8 kg
  • Max. Speed: 0.5 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.03 μm uni-directional
                              +/- 0.05  μm bi-directional
  • Linear Encoder: Optional

Piezo Rotation Stage PR-20

  • Travel: 360°, Endless
  • Max. Load: 0.5 kg
  • Max. Speed: 10°/sec
  • Max. Resolution: 0.00001 °
  • Repeatability: N/A ° uni-directional
                              N/A ° bi-directional

Piezo Rotation Stage PR-32

  • Travel: 360°, Endless
  • Max. Load: 1 kg
  • Max. Speed: 10°/sec
  • Max. Resolution: 0.00005 °
  • Repeatability: N/A ° uni-directional
                              N/A ° bi-directional
  • Angular Encoder: Optional
© 2009 Micos USA, LLC - All rights reserved.