Ultra High Precision Rotation Stage UPR-300 AIR Bearing / Rotary Positioner by MICOS

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	4.060		Ultra Precision Air Bearing Rotation Stage UPR-300 AIR More Information on Air Bearing Stages, Linear and Rotary

Key features
	High precision Toroid air bearings (patented 44.01262.4-09)
	High stiffness
	Torque motor
	Flatness < 0.1 µm
	Eccentricity < 0.1 µm
	Wobble < 2.5 µrad
	Repeatability 0.0004°
	Angular glass scale
	Speed up to 720°/sec
	Load up to 30 kg
	Clean room compatibility
	Download PDF data sheet ...

F A C T S
Load Characteristics	Fx (N)	Fz (N)	Mx (Nm)	Mz (Nm) (Peak)	Mz (Nm) (Con.)	ka (µrad/Nm)
TM-020	150	300	80	60	10	-

More Information on Air Bearing Stages, Linear and Rotary

Air-bearing Ultra-Precision-Rotation Stages of the structural series UPR-300 AIR and UPR-160 AIR are utilized wherever a maximum of quality concerning running - and positioning accuracy is requested. UPR-300 AIR Rotation Stages are mainly employed for measuring-, calibrate-, inspection systems and they are perfectly suited for mask exposition in semiconductor technologies. All Rotation Stages UPR-300 AIR are directly driven by a torque motor. A special, newly developed Toroid-air bearing (patent applied) guarantees more stiffness.

Rotation Stages UPR-300 AIR are standard equipped with optical angular systems. Standard resolutions up to 0.0002° can be achieved. For need of better positioning accuracies, resolutions or a larger free center hole Rotation Stages UPR-300 AIR can be offered with different angular systems. All Ultra-Precision-Rotation Stages UPR-300 AIR are equipped with a contactless reference- and limit switch.

Technical data
Rotation Range (°)	360, endless
Worm Gear reduction	-
Accuracy (°)	+/- 0.001388
Repeatability (°)	+/- 0.0001
Reversal Error (°)	-
Velocity Range (°/sec)	0.001 ... 720
Flatness (µm)	+/- 0.05
Eccentricity (µm)	+/- 0.05
Wobble (µrad)	+/- 1.25

Speed max. (°/sec)
TM-020	720

Resolution Closed-Loop (°)
AE-010, Angular scale (50-times interpolation)	0.0001

Winding Constant
Torque constant (Nm/Ams)	3.33
Back EMF constant, peak value V/(rads/sec)	2.7
Electrical resistance at 80° (Ohm)	1.42
Electrical inductance (mH)	3.23
Continuous current at 80° (Ams)	6.33

Compressed Air compare DIN ISO 8573-1
Leakage rate (L/min)	22 ... 25
Compressed Air range (bar)	4.5 ... 5.5

Material	Special Aluminium, black anodized
Weight (kg)	26.7
Note: Flatness < 0.1 µm, Eccentricity < 0.1 µm and Wobble < 2.5 µrad based on bearings (not rotation platform)

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More Information on Precision Rotation Stages

UPR-300 AIR Base & Motors

Rotation range

360°, endless

TM-020

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UPR-300 AIR Ordering information
Ultra Precision Rotation Stage		Order-No.
UPR-300 AIR		6830-9-100

Ultra Precision Rotation Stage AIR options		Order-No.
Air Supply compare DIN ISO 8573-1 Compressed Air	Technical data: Particular size .......... Class 1 Contained Oil ........... Class 1 Condensing point .... Class 2-3	K700-4-001
Air Checker	Pressure Sensor with motor disable	7160-9-123

	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.