Nano Rotation Stage NRS-series by MICOS

MOTION CONTROL Systems Positioners MiniP DirectD Control ManP Acces Vacuum MAC PhotonX Moskito Albatros Campus

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	2.online		Nano Rotation Stage NRS-series

Key features

		Ceramic servomotor ( piezo motor )
		Travel range 360° endless
		Maximum speed 360°/sec ( Application dependant )
		Complete *syst. f. P&P simplicity and low start up costs
		Bi-directional repeatability up to +/- 0.0002
		Cross roller bearings
		Special, tempered Aluminum
		Module combination
		Clean room and vacuum chamber capable
		*syst. f. P&P = systems for Plug and Play

F A C T S (MOTOR)
[motor-alias]	max. force	NRS-series	NRS-series	NRS-series
PM-020 [single]	8.8 N	NRS-40	NRS-80	NRS-133
PM-010 [double]	17.6 N	NRS-40	NRS-80	NRS-133
PM-010 [quad]	35.2 N		NRS-80	NRS-133

Description

Nano Rotation Stages NRS-series are employed for modern semiconductor / electronic production and laser applications.

For piezo-driven rotary positioners, please refer to the new M-660 nano rotation stage with piezo motor and high resolution optical encoder.

Click here for an overview of other high precision rotation stages .

Combined with other stages of MICOS high-dynamic precise positioning systems can be configured resulting in an efficient production. Nano Rotation Stages NRS-series are driven by piezo motors. They are controlled by closed loop modus. The measuring system with very high accuracy is installed near the guides. Especially significant is a very quiet and dynamic smooth move. Nano Rotation Stages of the NRS-series are available with controllers and integrated procress hardware and software or they can be purchased with our high resolution encoders and amplifiers, ready for connection to OEM and customer controllers. Stages can be offered for clean room and vacuum ( up to 10e-10 Torr ) application.

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

NRS-series Base & Motors

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

NRS-series Ordering information

	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.