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Linear Motor Stage UPS-150
MatchCode Ultra Precision Stage UPS-150
Key features

Linear motor
Key features

Travel range up to 305 mm (12")
Key features

Load capacity up to 50 kg
Key features

Maximum speed 600 mm/sec
Key features

Linear scale centrally mounted
Key features

20.000 hour MTBF
MOTION CONTROL  Systems  Positioners  MiniPos  DirectDrives  Controllers  ManPos  Accessories  Vacuum  MAC PhotonX  M  A  C
 Linear Motor Stage LMS-120
MatchCode Linear Motor Stage LMS-120
Key features Linear motor
Key features Travel range 40 mm
Key features Maximum speed 200 mm/sec
Key features Load capacity 2.5 kg
Key features Bi-directional repeatability +/- 0.2 µm
Key features Linear recirculating ball bearings
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Linear Motor Stage LMS-110
MatchCode Linear Motor Stage LMS-110
Key features Linear motor
Key features Travel range up to 155 mm
Key features Maximum speed 200 mm/sec
Key features Load capacity 5 kg
Key features Bi-directional repeatability +/- 0.2 µm
Key features Linear recirculating ball system
MOTION CONTROL  Systems  Positioners  MiniPos  DirectDrives  Controllers  ManPos  Accessories  Vacuum  MAC PhotonX  M  A  C
Linear Motor Stage LMS-180
MatchCode Linear Motor Stage LMS-180
Key features Linear motor
Key features Travel range up to 305 mm
Key features Maximum speed 400 mm/sec
Key features Load capacity up to 100 kg
Key features Bi-directional repeatability +/- 0.08 µm
Key features Linear recirculating ball system
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Linear Motor Stage LMS-300
MatchCode Linear Motor Stage LMS-300
Key features Linear motor with glass scale
Key features Travel range up to 815 mm
Key features Maximum speed 800 mm/sec
Key features Load capacity up to 200 kg
Key features Bi-directional repeatability +/- 0.2 µm
Key features Linear recirculating ball system
MOTION CONTROL  Systems  Positioners  MiniPos  DirectDrives  Controllers  ManPos  Accessories  Vacuum  MAC PhotonX  M  A  C
Ultra Precision Rotation Stage UPR-100
MatchCode Ultra Precision Rotation Stage UPR-100
Key features Torque motor
Key features Free center hole 20 mm diameter
Key features Repeatability 0.0002°
Key features Angular scale
Key features High-precision ball bearings
Key features Speed up to 360°/sec
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Ultra Precision Rotation Stage UPR-100 AIR
MatchCode Ultra Precision Rotation Stage UPR-100 AIR
Key features High precision air bearings
Key features Free center hole 20 mm diameter
Key features Torque motor
Key features Flatness < 0.2 µm
Key features Eccentricity < 0.2µm
Key features Wobble < 5 µrad
MOTION CONTROL  Systems  Positioners  MiniPos  DirectDrives  Controllers  ManPos  Accessories  Vacuum  MAC PhotonX  M  A  C
Ultra Precision Rotation Stage UPR-160 F
MatchCode Ultra Precision Rotation Stage UPR-160 F
Key features Free center hole 35 mm
Key features Torque motor
Key features Repeatability 0.0004°
Key features Angular scale
Key features High-precision ball bearings
Key features Speed up to 360°/sec
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Ultra Precision Rotation Stage UPR-160 F AIR
MatchCode Ultra Precision Rotation Stage UPR-160 F AIR
Key features High precision Toroid air bearings (patented 44.01262.4-09)
Key features Free center hole 28 mm diameter
Key features High stiffness
Key features Torque motor
Key features Flatness < 0.1 µm
Key features Eccentricity < 0.1 µm
MOTION CONTROL  Systems  Positioners  MiniPos  DirectDrives  Controllers  ManPos  Accessories  Vacuum  MAC PhotonX  M  A  C
Ultra Precision Rotation Stage
MatchCode Ultra Precision Rotation Stage UPR-300
Key features Torque motor
Key features Repeatability 0.0004°
Key features Angular glass scale
Key features High-precision ball bearings
Key features Speed up to 720°/sec
Key features Load up to 120 kg
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Ultra Precision Rotation Stage UPR-300 AIR
MatchCode Ultra Precision Rotation Stage UPR-300 AIR
Key features High precision Toroid air bearings (patented 44.01262.4-09)
Key features High stiffness
Key features Torque motor
Key features Flatness < 0.1 µm
Key features Eccentricity < 0.1 µm
Key features Wobble < 2.5 µrad
 
 
Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.
  
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