Precision Rotary Motion
Ultra Precision Rotation Stage, Motorized, UPR-100
A high precision rotary stage for optics, semiconductor and photonics automation. Focused on research and industry: Ultra Precision Rotation and Rotary Stages .
Ultra Precision Rotation Stage, Motorized, UPR-100
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Key features
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This motorized ultra-precision rotation stage is a more compact version of the UPR-160. It is equipped with a direct-drive torque motor for high speed and resolution. Excellent flatness of motion and concentricity with minimum vibrations are also guaranteed by this design. The absence of gears and provides longer lifetime while eliminating play and backlash. UPR rotation stages can also be equipped with air bearings for even higher precision. Closed-loop operation is provided by use of direct metrology optical encoders.
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