Piezo Positioner LPS-65 / N-565: X, X-Y Stage

PI MICOS develops and manufactures precision positioning systems for industry and research such as synchrotrons, beamlines

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Key features

Different Types of Piezo Motor Positioners
X and XY combinations (6 axis on request)
Travel: 13, 26 mm and 52 mm
Max. Load: 1 kg
Max. Speed: 10 mm/sec
Encoder Resolution: < 2 nm
Repeatability: to 1 nm
Linear Encoder: Optional

This low profile piezo positioner is available in X and XY configurations. It can handle loads to 2 kg and is based on a proprietary high-force piezo stepping motor providing nanometer resolution and repeatability in closed loop. Vacuum compatible and non magnetic versions are also offered. The large platform and the cross roller bearings provide excellent guiding precision and smooth, highly accurate motion in the nanometer range with travel ranges of 1/2", 1" and 2". The stage achieves high speed to 10 mm/sec. Customized versions with up to 6 axes in parallel kinematics formation are available on request.

Piezo Positioner Details and Ordering Information

Travel Dependent Specifications
Travel Range (mm)	13 /26 / 52
Weight (kg)	0.3 /0.4/ 0.6

Motor/Feedback Dependent Specifcations
Speed Max (mm/sec)	10
Resolution Typical (µm)	0.001
Bi-directional Repeatability (µm)	� 0.001
Uni-directional Repeatability (µm)	0.001
Fx	50
Fy	10
Fz	20
Mx	2.1 Nm
My	1.7 Nm
Mz	2.1 Nm

Motor
Motor Type	Piezo stepping motor

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