High-Vacuum Precision Positioning Stages to 10-7 torr (HV)
Key features
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Special vacuum motor
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Measuring system modified for the use in vacuum
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Motor and limit switches equipped with teflon braids 1m length wired to a test plug
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Standard limit switches, with plastic parts
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All Al parts left un-anodized
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Stainless steel screws
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All guides and driving elements are equipped with vacuum grease
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No use of CuZn alloys
- All holes are vented
More information on Vacuum Preparation and Vacuum Analyis Equipment at PI miCos