Air Bearing Linear Stages, X, XY, Planar
- Travel: 50 to 1000mm
- Max. Load: 2 to 800kg
- Max. Speed: 250mm/sec to 1m/sec
- Resolution: to 1 nanometer and below
- Closed-Loop, Linear Encoder
- Controller Choice
Precision Linear Motion
High Precision Linear Positioners & Motorized Linear Stages
PI miCos linear positioning solutions cover precision X, XY, and Z motion from compact motorized stages and actuators to high-load, long-travel, and air-bearing positioning systems.
Precision Linear Positioning Technologies
These precision linear positioners are designed for motion from the micron level down to the nanometer range in applications including biotechnology, semiconductor manufacturing, photonics, research, and automation. PI miCos systems use a variety of drive, bearing, and feedback technologies, with vacuum and ultra-high-vacuum configurations available for many positioning systems.
Linear Stages
Motorized translation stages for precision single-axis motion over a wide range of travel and load requirements.
XY Positioning
Multi-axis positioning stages for scanning, inspection, alignment, and automation.
Vertical Motion
Z-axis and elevation stages for precision vertical positioning and focusing applications.
Precision Actuators
Compact linear actuators for integration into instruments and custom motion systems.
PI miCos Linear Stages & Positioners
Legacy PI miCos products represented on this page are retained below with their original specifications, images, and product links.
Ultra High Precision Linear Positioner UPM-160
- Travel: 205 mm
- Max. Load: 15 kg
- Max. Speed: 100 mm/sec
- Max. Resolution: 0.001 μm
- Repeatability: 0.035 μm uni-directional +/- 0.035 μm bi-directional
- Linear Encoder: Optional
Ultra High Precision Stage UPS-150
- Travel: 52 - 305 mm
- Max. Load: 15 kg
- Max. Speed: 600 mm/sec
- Max. Resolution: 0.001 μm
- Repeatability: 0.015 μm uni-directional +/- 0.025 μm bi-directional
- Linear Encoder: Optional
High Precision Linear Positioner HPS-170
- Travel: 52 - 305 mm
- Max. Load: 35 kg
- Max. Speed: 90 mm/sec
- Max. Resolution: 0.05 μm
- Repeatability: 0.05 μm uni-directional +/- 0.05 μm bi-directional
- Linear Encoder: Optional
Linear Positioner LS-270
- Travel: 155 - 1016mm
- Max. Load: 150 kg
- Max. Speed: 150 mm/sec
- Max. Resolution: 0.05 μm
- Repeatability: 0.05 μm uni-directional +/- 0.04 μm bi-directional
- Linear Encoder: Optional
Linear Motor Stage LMS-300
- Travel: 415 - 815 mm
- Max. Load: 100 kg
- Max. Speed: 800 mm/sec
- Max. Resolution: 0.005 μm
- Repeatability: 0.05 μm uni-directional +/- 0.05 μm bi-directional
- Linear Encoder: Included
Linear Motor Stage LMS-230
- Travel: 52 mm
- Max. Load: 15 kg
- Max. Speed: 400 mm/sec
- Max. Resolution: 0.001 μm
- Repeatability: 0.01 μm uni-directional +/- 0.02 μm bi-directional
- Linear Encoder: Included
Linear Motor Stage LMS-180
- Travel: 155 - 508 mm
- Max. Load: 45 kg
- Max. Speed: 500 mm/sec
- Max. Resolution: 0.015 μm
- Repeatability: 0.05 μm uni-directional +/- 0.1 μm bi-directional
- Linear Encoder: Included
Linear Positioner LS-180
- Travel: 155 - 508 mm
- Max. Load: 100 kg
- Max. Speed: 200 mm/sec
- Max. Resolution: 0.05 μm
- Repeatability: 0.05 μm uni-directional +/- 0.1 μm bi-directional
- Linear Encoder: Optional
Linear Positioner LMS-120
- Travel: 40 mm
- Max. Load: 4 kg
- Max. Speed: 200 mm/sec
- Max. Resolution: 0.015 μm
- Repeatability: 0.03 μm uni-directional +/- 0.05 μm bi-directional
- Linear Encoder: Included
Linear Stage LS-120
- Travel: 40 mm
- Max. Load: 10 kg
- Max. Speed: 90mm/sec
- Max. Resolution: 0.05 μm
- Repeatability: 0.1 μm uni-directional +/- 0.1 μm bi-directionally
- Linear Encoder: Optional
Linear Stage LS-110
- Travel: 26 - 305 mm
- Max. Load: 10 kg
- Max. Speed: 90 mm/sec
- Max. Resolution: 0.05 μm
- Repeatability: 0.1 μm uni-directional +/- 0.1 μm bi-directional
- Linear Encoder: Optional
Linear Motor Stage LMS-100
- Travel: 200 - 1000 mm
- Max. Load: 20 kg
- Max. Speed: 500 mm/sec
- Max. Resolution: 0.015 μm
- Repeatability: 0.1 μm uni-directional +/- 0.1 μm bi-directional
- Linear Encoder: Optional
Linear Motor Stage LMS-80
- Travel: 120 mm
- Max. Load: 5 kg
- Max. Speed: 500 mm/sec
- Max. Resolution: 0.015 μm
- Repeatability: 0.1 μm uni-directional +/- 0.1 μm bi-directional
- Linear Encoder: Included
Linear Motor Stage LMS-60
- Travel: 25 - 65 mm
- Max. Load: 3 kg
- Max. Speed: 500 mm/sec
- Max. Resolution: 0.015 μm
- Repeatability: 0.1 μm uni-directional +/- 0.1 μm bi-directional
- Linear Encoder: Included
Precision Linear Stage PLS-85
- Travel: 26 - 102 mm
- Max. Load: 10 kg
- Max. Speed: 100 mm/sec
- Max. Resolution: 0.05 μm
- Repeatability: 0.05 μm uni-directional +/- 0.1 μm bi-directional
- Linear Encoder: Optional
Linear Stage LS-65
- Travel: 26 - 102 mm
- Max. Load: 6 kg
- Max. Speed: 10 mm/sec
- Max. Resolution: 0.2 μm
- Repeatability: 0.3 μm uni-directional +/- 5 μm bi-directional
- Linear Encoder: Not Available
Micro Stage MTS-65
- Travel: 13 - 52 mm
- Max. Load: 2 kg
- Max. Speed: 10 mm/sec
- Max. Resolution: 0.05 μm
- Repeatability: 0.1 μm uni-directional +/- 0.2 μm bi-directional
- Linear Encoder: Optional
Micro Stage MTS-70
- Travel: 10 mm
- Max. Load: 2 kg
- Max. Speed: 8 mm/sec
- Max. Resolution: 0.05 μm
- Repeatability: 0.1 μm uni-directional +/- 0.2 μm bi-directional
- Linear Encoder: Optional
Linear Stage VT-75
- Travel: 50 - 600mm
- Max. Load: 5 kg
- Max. Speed: 100 mm/sec
- Max. Resolution: 0.4 μm
- Repeatability: 0.4 μm uni-directional +/- 0.6 μm bi-directional
- Linear Encoder: Not Available
Linear Stage VT-40
- Travel: 30 - 100 mm
- Max. Load: 1 kg
- Max. Speed: 150 mm/sec
- Max. Resolution: 0.4 μm
- Repeatability: 0.4 μm uni-directional +/- 4 μm bi-directional
- Linear Encoder: Not Available
Translation Stage VT-80
- Travel: 25 - 300 mm
- Max. Load: 5 kg
- Max. Speed: 20 mm/sec
- Max. Resolution: 0.2 μm
- Repeatability: 0.4 μm uni-directional +/- 10 μm bi-directional
- Linear Encoder: Not Available
Linear Stage LS-40
- Travel: 13 - 52 mm
- Max. Load: 2 kg
- Max. Speed: 5 mm/sec
- Max. Resolution: 0.1 μm
- Repeatability: 0.1 μm uni-directional +/- 3 μm bi-directional
- Linear Encoder: Not Available
Micro Stage MT-55
- Travel: 5 mm
- Max. Load: 0.8 kg
- Max. Speed: 1 mm/sec
- Max. Resolution: 0.2 μm
- Repeatability: 0.2 μm uni-directional +/- 4 μm bi-directional
- Linear Encoder: Not Available
X-Y Positioning Stage CS-430
- Travel: 350 x 300 mm
- Max. Load: 30 kg
- Max. Speed: 100 mm/sec
- Max. Resolution: 0.05 μm
- Repeatability: 0.1 μm uni-directional +/- 0.1 μm bi-directional
- Linear Encoder: Optional
XY Positioning Stage MS-8
- Travel: 205 x 205mm
- Max. Load: 4 kg
- Max. Speed: 90 mm/sec
- Max. Resolution: 0.05 μm
- Repeatability: 0.25 μm uni-directional +/- 0.5 μm bi-directional
- Linear Encoder: Optional
XY Scan Stage MS-4
- Travel: 102 x 102 mm
- Max. Load: 3 kg
- Max. Speed: 90 mm/sec
- Max. Resolution: 0.05 μm
- Repeatability: 0.25 μm uni-directional +/- 0.5 μm bi-directional
- Linear Encoder: Optional
XY Scan Stage KT-120
- Travel: 26 x 26 mm
- Max. Load: 5 kg
- Max. Speed: 3.5 mm/sec
- Max. Resolution: 0.2 μm
- Repeatability: 2 μm uni-directional +/- 5 μm bi-directional
- Linear Encoder: Not Available
Nano Precision Vertical Linear Stage NPE-200
- Travel: 13 mm
- Max. Load: 30 kg
- Max. Speed: 0.2 mm/sec
- Max. Resolution: 0.001 μm
- Repeatability: 0.04 μm uni-directional +/- 0.4 μm bi-directional
- Linear Encoder: Optional
Ultra High Precision Vertical Linear Stage UPL-160
- Travel: 26 mm
- Max. Load: 30kg
- Max. Speed: 30 mm/sec
- Max. Resolution: 0.001 μm
- Repeatability: 0.03 μm uni-directional +/- 0.035 μm bi-directional
- Linear Encoder: Optional
Vertical Linear Stage ES-100
- Travel: 13 - 26 mm
- Max. Load: 5.5 kg
- Max. Speed: 20 mm/sec
- Max. Resolution: 0.05 μm
- Repeatability: 0.05 μm uni-directional +/- 0.1 μm bi-directional
- Linear Encoder: Optional
Vertical Linear Stage ES-82
- Travel: 13 - 26 mm
- Max. Load: 5.5 kg
- Max. Speed: 20 mm/sec
- Max. Resolution: 0.05 μm
- Repeatability: 0.05 μm uni-directional +/- 0.01 μm bi-directional
- Linear Encoder: Optional
Vertical Linear Stage ES-70
- Travel: 6.25 mm
- Max. Load: 2 kg
- Max. Speed: 0.1 mm/sec
- Max. Resolution: 0.3 μm
- Repeatability: 0.3 μm uni-directional +/- 2 μm bi-directional
- Linear Encoder: Not Available
Vertical Linear Stage ES-65
- Travel: 26 mm
- Max. Load: 2 kg
- Max. Speed: 20 mm/sec
- Max. Resolution: 1 μm
- Repeatability: 5 μm uni-directional +/- 2 μm bi-directional
- Linear Encoder: Not Available
Micro Linear Actuator MA-35
- Travel: 52 mm
- Max. Force: 500 kg
- Max. Speed: 100 mm/sec
- Max. Resolution: 0.1 μm
- Repeatability: 0.2 μm uni-directional +/- 1 μm bi-directional
- Linear Encoder: Not Available
Micro Linear Actuator MP-20 L
- Travel: 75 mm
- Max. Force: 125 N
- Max. Speed: 3.5 mm/sec
- Max. Resolution: 0.1 μm
- Repeatability: 0.3 μm uni-directional +/- 1 μm bi-directional
- Linear Encoder: Not Available
Micro Linear Actuator MP-20 S
- Travel: 12.5 mm
- Max. Force: 20 N
- Max. Speed: 3 mm/sec
- Max. Resolution: 0.5 μm
- Repeatability: 2 μm uni-directional +/- 5 μm bi-directional
- Linear Encoder: Not Available
Micro Linear Actuator MP-15
- Travel: 6 - 12.7 mm
- Max. Force: 10 N
- Max. Speed: 0.3 mm/sec
- Max. Resolution: 0.2 μm
- Repeatability: 0.5 μm uni-directional +/- 10 μm bi-directional
- Linear Encoder: Not Available
Looking for Current Linear Motion Solutions?
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