PI offers compact piezo-motor positioners for long-travel precision motion as well as frictionless piezo-flexure nanopositioning stages for applications requiring sub-nanometer resolution, fast response, and exceptional repeatability.
PI miCos piezo stages use stick-slip, ultrasonic, and piezo-walk/grabber motor principles to combine compact dimensions with millimeter-scale travel. Linear and rotary versions are guided by precision bearings and can use high-resolution optical encoders for closed-loop positioning.
For the highest precision, frictionless piezo-flexure stages with capacitive feedback provide repeatable sub-nanometer motion, very fast settling, high scanning rates, and extremely long service life. These systems are suited to microscopy, metrology, photonics, semiconductor, and other precision applications.
PI's flexure-guided nanopositioning stages extend performance into the sub-nanometer range with frictionless guidance, capacitive sensors, high dynamics, and scanning rates of hundreds of hertz. Explore current PI nanopositioning systems →
