MICOS products are subject to strict quality controls. Important characteristics of linear stages such as:

• flatness
• straightness
• accuracy
• pitch
• yaw
• velocity

are measured by using a laser interferometer. The features for quality of rotatory components are certified by using angle measuring systems or auto-collimators and measuring sensors. Doing this the following data are measured:

• angle errors incremental/absolute
• positioning errors
• eccentricity
• flatness
• wobble

This specification means the ability to repeat a motion in one direction only. Backlash and hysteresis are compensated.

The ability to achieve a commanded position over many attempts independent of the direction where positioning occurs.

 

Also called concentricity, occurs in a rotation stage and defines the deviation of the center of rotation from its mean position.