All certified accuracies are related to measurements within a room for precision measuring with stable temperatures of 20°C. The mounting surface is a granit plate with a flatness of less than 1.4µm on a surface of 800 mm x 600 mm. All data refer to firmly mounted positioning stages on this granite. Translational measurement is made by using the laser measuring system ZLM-500 by ZEISS. The measuring method corresponds to VDI / DGQ 3441 or DIN ISO 230 or VDI / VDE 2617. The compensation of environmental influences is made by meteorological office.

 

 

The measurement of the angle error and the repeatability is made by Heidenhain Angle Measuring System ERO 725. The accuracy is +/- 3.7 arcsec. Eccentricity and wobble are measured by sensors. Flatness is certified contactless by using laser triangulation.