Vacuum Precision Positioning Stages: Linear, Rotary, Hexapods, & Turn-Key Systems

Operating a precision motion system or postioners in vacuum is a design challenge. Issues such as outgassing, contamination and lack of air cooling are complicating the system design. PI miCos has developed a large variety of solutions that address each of these problems. Most of our standard positioning products are available in vacuum and UHV compatible versions as specified below.