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2.204
Cross Stage CS-430
   
Vacuum option     Linear or Rotation Feedback
   
  Key features
XY travel 350x300 mm
Maximum speed 100 mm/sec
Linear Scale
Load capacity 30 kg
Crossed-roller bearings
Special, tempered Aluminium
Limit switches integrated
Button Download PDF data sheet ...
 
 

F A C T S                
Load Characteristics Fx (N) Fy (N) Fz (N) Mx (N) My (Nm) Mz (Nm) kax (µrad/Nm) kay (µrad/Nm)
2Phase-070 110 110 300 500 500 500 20 20


D E S C R I P T I O N

The Cross Stage CS-430 is employed for industrial test-, respectively inspection systems.The travel ranges XY are 350 x 300 mm. The XY-Stage CS-430 is equipped with recirculating ball screws with little backlash. All CS-430 Stages incorporate smooth running direct 2-phase-stepper motors. The scan stage is fitted out with two limit switches. For higher positioning accuracy and homogeneous speed thpe XY-Stage CS-430 can be optionally equipped with a length measuring system. The Cross Stage uses precision crossed-roller bearings for long life and increased load capacity. Two mechanical limit switches are firmly integrated in the XY stage. Optical and inductive limit switches as well as test and calibration certificates can be supplied on request.

 

 

Technical data  
Travel Range (mm)
350x300
Bi-directional Repeatability (µm)
+/- 0.2 ... 8
Accuracy per 50 mm (µm)
+/- 0.4 ... 10
Velocity Range (mm/sec)
0.001 ... 100
Ballscrew Pitch (mm)
10

Speed max.(mm/sec)
2Phase-070
100

Resolution Open-Loop (µm)  
2Phase-070
0.25 (SMC) | 25 (FS)

Resolution Closed-Loop (µm)
LS-010, Linear steel scale
0.1

Current (Amps) / Voltage (Volts)
2Phase-070
2 | -

Material
Special Aluminium, black anodized
Weight (kg)
23
Note: (SMC): Micro-Step Mode, (FS): Full-Step 2Phase
More info: Detailed information, concerning motor and connectors, see: Appendix

 

 

CS-430 Base + Motors  
 
       
   
Travel ranges
350 x 300 mm
 
       
2Phase-070      
 
  2Phase-070    

 

 

CS-430 Ordering information      
2Phase-070
2
   
without LS-010
LS-010, Linear steel scale
0
1
   
 
       
           
 
 
Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.
 
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