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2.210
Scan Table MS-8
   
Vacuum option     Linear or Rotation Feedback
 
Key features
XY travel 205x205 mm (8"x 8")
Clear aperture 205x205 mm
Maximum speed 90 mm/sec
Load capacity 4 kg
Special, tempered Aluminium
Limit switches integrated
 
 

Load Characteristics Fx (N) Fy (N) Fz (N) Mx (N) My (Nm) Mz (Nm) kax (µrad/Nm) kay (µrad/Nm)
DC-B-030 20 20 40 0.5 0.5 0.5 400 400
2Phase-033  20 20 40 0.5 0.5 0.5 400 400

 

D E S C R I P T I O N

The Scan Stage MS-8 is employed for industrial test-, respectively inspection systems in the range of research and development. Travel ranges XY are 205 x 205 mm (8" x 8"). Due to the flat structural shape the Scan Stage MS-8 is suited for tasks of reflected light and transmitted light microscopy. With the Scan Stage MS-8 samples with a dimension of 205 x 205 mm can be tested and measured. Accessories such as glass plates, adapter for Petri-dishes, Micro-titer disks and slides are offered.

 

 

The Scan Stage MS-8 is equipped with recirculating ball screws with little backlash. They guarantee a very quiet smooth move. Motor-driven variants such as DC- and 2-phase-micro-step (SMC-series) motors of MICOS are available. The scan stage is fitted out with two limit switches. For higher positioning accuracy and homogeneous speed the Scan Stage MS-8 can be optionally equipped with a length measuring system.

 

Technical data  
Travel Range (mm)
205 x 205
Bi-directional Repeatability (µm)
+/- 0.2 ... 8
Accuracy per 50 mm (µm)
+/- 0.4 ... 10
Velocity Range (mm/sec)
0.001 ... 90
Ballscrew Pitch (mm)
2

Speed max.(mm/sec)
DC-B-030
90
2Phase-033
35

Resolution Open-Loop (µm)
2Phase-033
0.1 (SMC) | 10 (FS)

Resolution Closed-Loop (µm)  
RE-020, Rotary encoder feedback
0.1
LS-010, Linear scale
0.1

Current (Amps) / Voltage (Volts)
DC-B-030
1.1 | 24
2Phase-033
1.2 | -

Material
Special Aluminium, black anodized
Weight (kg)
9.5
Note: (SMC): Micro-Step Mode, (FS): Full-Step 2Phase
More info: Detailed information, concerning the motor and connectors, see: Appendix
 

 

MS-8 Motors 
 
DC-B-030
 
2Phase-033

 

 

Travel ranges
205 x 205 mm

MS-8 Base

 

 

 MS-8 Ordering information  
DC-B-030
2Phase-033
 
1
2
     
without LS-010
LS-010, Linear steel scale
 
0
1
 
   
 
Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.
 
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