Motion Controller SMC-series Position-Error-Correction (PEC) by MICOS

MOTION CONTROL Systems Positioners MiniP DirectD Control ManP Acces Vacuum MAC PhotonX Moskito Albatros Campus

	Page
	5.015		SMC-series Position-Error-Correction (PEC)

D E S C R I P T I O N

With the option real-time position-error-correction we are able to increase the absolute positioning accuracy without using expensive linear encoders. With Laser-Interferometer, we measure the stage in steps of 1 mm, and store the position-deviations in the non-volatile memory of the controller. This option includes the measurement, the documents as graphical and ASCII-data (files), and the programming of the controller.

M E A S U R I N G M E T H O D S

Enclosed a diagramm measured with Laser-Interferometer with and without the correction:
Stage: HPS-170, Measured in a height 90mm above the moving platform.

Without correction

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

With
correction

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

The steps in the slope is the resolution of the interferometer

Velocity: 45 nm/s

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

Zoomed, the steps in the slope is the resolution of the interferometer

Velocity: 45 nm/s

	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.