Test and Calibration Systems Typ I

Air bearing travel axis with travel range 600 mm. Especially for the measurement of high-precise length measuring systems a travel stage with optimal sequence accuracies (pitch, yaw and roll angle) is necessary. The system consists of a precisely lobed granite plate and an aluminum carrier. The especially developed air-bearing guiding system guarantees a maximum of sequence accuracy and guiding stiffness.

Test and Calibration Systems Typ II

Ultra-precision 2-axes rotary air-bearing positioning system. This system is suited where a maximum of positioning accuracy, repeatability and resolution is required. Both air-bearing axes have a common intersection point. With this positioning system resolutions and a repeatability up to 1 arcsec can be reached. The system is equipped with high-quality rotation encoders with an accuracy of 0.4 arcsec.

Calibration and Measurement of CCD-Chips

The system serves for the measurement and the calibration of CCD-Chips with high resolution. This 3-axes positioning system consists of one Rotation Stage DT-120 and two Linear Stages of the series MT-90. All components are equipped with high-quality measurement systems. The rotary resolution is 5 arsec., the translational resolution is 0.1 µm. The repeatability of this system is more than 1 µm and the accuracy of the complete system is 6 µm.