Air
Bearing Stage Made from Glass
Homogeneous,
high-precise, air-bearing xy stage with direct
drive for processing nano structures in Semi
Conductor-, LCD- and Flat Panel Industries.The
positioning system was especially developed
to meet requirements of highest accuracy. Base
and guiding elements were especially designed
in a glass ceramic sandwich structure. In order
to achieve a maximum of accuracy special air
bearing geometries have been developed. The
position measuring in x and y direction is
made by a laser interferometer that is coupled
at the two mirrors on the slide. Drive is made
by linear motors. The positioning system works
contactless and therefore allows a maximum
of accuracy and process stability.
