X-Ray Diffraction and Tomography

Positioning System for High-Vacuum 10-7 torr The 4-axes positioning system was especially developed for the vacuum 10-7 torr. The system has a common pivot point. In all components vaccum suitable grease is used. The manipulators are driven by vacuum motors of PHYTRON. The aluminum parts are not anodized. The system is controlled by the 4-axes positioning controller SMC-Corvus.

OEM Application for UV-Laser

The miniature Micro Stage MTS-70 was developed for vacuum application with limited space conditions. The drive is made by a special micro step motor without gear. For need of high positioning accuracy and repeatability (0.1 µm) the Micro Stages MTS-70 are offered with a linear measuring system. An optimal performance of the compatibility is achieved by using our SMC or NI controllers.

OEM Application for UHV

The Precision Rotation Stages PRS-110 are mainly applied in the range of industrial measuring technique, vision control, micro-laser application, automation systems, robotic and for semiconductor technology. The body is fabricated from a special, high-rigidity, tempered Al-alloy. Two calibrated prestressed four-point double rows without backlash guarantee a small wobble respectively smallest deviations of flatness and eccentricity. A hardened and ground screw worm combined with a calibrated gear wheel guarantees an optimal quiet smooth move. The Precision Rotation Stages PRS-110 without backlash are delivered by PRS-110 Precision Rotation Stages can be MICOS equipped with optical angular systems. Resolutions up to 0.0002 are standard offered. The Precision Rotation Stages PRS-110 are equipped with a limit-, reference switch. Additionally contactless limit switches can be mounted. Drive variants such as DC-, 2-phase-micro-step (SMC-series) motors are available.