Engineered Positioning Systems - High Precision Motion Control 6 by MICOS

MOTION CONTROL Systems Positioners MiniP DirectD Control ManP Acces Vacuum MAC PhotonX Moskito Albatros Campus

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	1.06-07		Engineered Systems

Hexapod for Vacuum

This system consists of a hexapod, a linear stage, and an additional tilting platform. This special arrangement was chosen to achieve a maximum of travel range within the limited space of the high vacuum chamber in which this system is used. The application is the angle- dependant characterization of superconducting high frequency detectors (far infrared, FIR) for astronomy. The travel range in x and y is +/- 180 mm with angles of +/- 20° at any position.

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

The linear stage allows a travel range of 800 mm in z direction.

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

	The absolute positioning errors of the hexapod have been measured (seefigure), and a special compensation software is able to reduce these errors by a factor of 20.

	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.