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	2.022		Nano Precision Vertical Positioner / Elevation Stage NPE-200

	Key features Travel range 13 mm (1/2") Highest resolution 2nm Bi-directional repeatability +/- 100 nm Linear scale centrally mounted Load capacity lifetime  Maximum speed 0.2 mm/sec Double crossed-roller bearings Strength stress-relieved aluminium Load capacity 30 kg Limit switches integrated 20.000 hour MTBF Module combination

F A C T S
Load Characteristics	Fx (N)	Fy (N)	Fz (N)	Mx (N)	My (Nm)	Mz (Nm)	kax (µrad/Nm)	kay (µrad/Nm)
2Phase-034	100	80	300	100	50	100	3	1

 

D E S C R I P T I O N	NPE-200 front view
The NPE-200 Nano Precision Vertical Positioner is a further improvement of of the UPL 160 Elevation Stage and offers highest precision. Providing maximum Z-positioning accuracy, stability and reliability it is an indispensable vertical elevation positioner in the field of Lithography, Fibre Alignments and Wafer Sub Surfaces Inspection. Stiffness and smooth move will be achieved by high-quality double crossed roller bearings and a special, stressfree tempered Al-alloy guarantees a homogeneous non-warping structure. The Nano-Precision Elevator NPE-200 is offered with 2-phase-micro-step motor with a backlash gear head (ratio=50:1). NPE-200 is equipped with a linear encoder of best technical performance. This encoder is installed between the guide resulting in an accuracy of 0.5µm/12.7mm. The Nano-Precision Elevator NPE-200 is standardly equipped with two mechanical limit switches. Optional contactless (magnetic / optical) limit switches can be mounted. The precision elevation stage is calibrated supplied with a test certificate (flatness, pitch, yaw, straightness & position). The measurement is made mounted and unloaded on granit with a flatness < 1µm.

 

Technical data
Travel Range (mm)	13
Bi-directional Repeatability (µm)	+/- 0.1
Accuracy (µm)	+/- 0.25*
Velocity Range (mm/sec)	0.00001 ... 0.2
Straightness / Flatness (µm)	+/- 0.7
Pitch (µrad)	+/- 20
Yaw (µrad)	+/- 20
Ballscrew Pitch (mm)	2
Speed max. (mm/sec)
2Phase-034	0.2
Resolution Closed-Loop (µm)
LS-040, Linear Zerodur scals	0.002
Current (Amps) / Voltage (Volts)
2Phase-034	1.2 | -
Material	Special Alu, black anodized
Weight (kg)	8.5
Note: Deliver only with Controllers SMS series More info: Detailed information, concerning motor and connectors, see: Appendix *=Two point slope correction

 

NPE-200 Motor
	2Phase-034

 

 

NPE-200 Base

 

 

NPE-200 Ordering information
			2Phase-034	2
			13 mm (1/2")	1
			LS-040, Linear Zerodur scale	0