High Precision Stage HPS-170 by MICOS

MOTION CONTROL Systems Positioners MiniP DirectD Control ManP Acces Vacuum MAC PhotonX Moskito Albatros Campus

Key features
	Travel range up to 305 mm
	Maximum speed 90 mm/sec
	Linear scale centrally mounted
	Load capacity up to 35 kg
	Bi-directional repeatability +/- 0.2 µm
	Crossed-roller bearings
	Specia,l tempered Aluminium
	Limit switches integrated
	Module combination

D E S C R I P T I O N	High Precision Stage HPS-170

With its new structural shape the HPS-170 is especially developed to meet high positioning demands. Due to its precise and smooth operation this linear stage is perfectly suited for measuring and inspection equipment. All important parts are made of a special, tempered Al-alloy which guarantees a longtime stability. The Precision Stage HPS-170 is available with a DC,- or 2-phase-micro step (SMC-series) motor. Two limit switches are firmly integrated in the precision stage. Optionally the precision stages can be equipped with a linear encoder which guarantees a resolution of 0.1 µm. Optical and inductive limit switches as well as test and calibration certificates can be supplied on request.

Technical data
Travel Range (mm)	52	102	155	205	305
Bi-directional Repeatability (µm)	+/- 0.2 ... 2
Accuracy (µm)	+/- *0.4 ... 5
Velocity Range (mm/sec)	0.001 ... 90
Straightness / Flatness (µm)	+/- 0.75	+/- 1	+/- 2	+/- 3	+/- 4
Pitch (µrad)	+/- 20	+/- 25	+/- 30	+/- 35	+/- 40
Yaw (µrad)	+/- 40
Ballscrew Pitch (mm)	2

Speed max. (mm/sec)
DC-B-041	90
2Phase-033	35

Resolution Open-Loop (µm)
2Phase-033	0.2 (SMC) / 10 (FS)

Resolution Closed-Loop (µm)
RE-010, Rotary encoder	1	higher resolution on reqest!
LS-010, Linear steel scale	0.1	higher resolution on reqest!

Nominal Current (Amps) / Voltage (Volts)
DC-B-041	3.8 \| 24
2Phase-033	1.2 \| -

Material	Special Alu, black anodized
Weight (kg)	5	5.5	6	6.5	7

Note: (SMC) Micro-Step Mode, (FS): Full-Step 2Phase More info: Detailed information, concerning the motor and connectors, see: Appendix *=Two point slope correction

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

HPS-170 Base

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.