Ultra Precision, High Speed Linear Motor Stage UPS-150 with High Resolution Linear Encoder

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	4.004		Ultra Precision Stage UPS-150

Key features
	Linear motor
	Travel range up to 305 mm (12")
	Long-time stability
	Smooth running
	Repeatability +/- 0.1 µm
	Linear scale centrally mounted
	Load capacity in lifetime
	Maximum speed 600 mm/sec
	Crossed-roller bearings
	Strength stress-relieved aluminium
	Load capacity up to 50 kg
	20.000 hour MTBF
	Module combination
	Download PDF data sheet ...

F A C T S
Load Characteristics	Fx (N)	Fy (N) (Peak)	Fy (N) (Con.)	Fz (N)	Mx (N)	My (Nm)	Mz (Nm)	kax (µrad/Nm)	kay (µrad/Nm)
LM-010	400	88	22	500	100	200	100	5	3

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D E S C R I P T I O N

The Ultra Precision Linear Motor Stage UPS-150 is related to the UPM-160, and especially designed for high performance, ultra high precision applications in Wafer Surface Inspection, Fiber Alignment, High Precision Robotics and for all tasks where a maximum of positioning accuracy, precision, speed and reliability is absolutely necessary. All Ultra Precision Linear Motor, Direct Drive Stages of the UPS-150 series are equipped with a linear measuring encoder system centrally located between the linear guides. Due to high-quality crossed-roller bearings a maximum load capacity and smooth travel and motion is guaranteed. A special, stress free, tempered Al-alloy body guarantees a homogeneous non-warping structure. The structural series 150 are driven by linear ironless motors and provide high acceleration and high velocity and speed. System accuracy of less than 1µm/100mm respectively, bi-directional repeatability of 0.1µm is guaranteed.

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Additionally contactless limit switches can be mounted. The positioning accuracy of the structural series 150 is only guaranteed with PI MICOS motion controllers. The UPS-150 Ultra High Precision Linear Motor Stages are supplied calibrated and come with a certificate for flatness, straightness, pitch, yaw & position accuracy). The measurement is made mounted and unloaded on granite with a flatness better than 1µm.

See our New Series of Direc Drive Linear Motor Stages with Nanometer Precision

UPS-150 [detail]

Technical data
Travel Range (mm)	55	105	155	205	305
Bi-directional Repeatability (µm)	+/- 0.1
Accuracy per 50 mm (µm)	+/- *0.25 ... 0.5
Velocity Range (mm/sec)	0.001 ... 600
Straightness / Flatness (µm)	< +/- 0.5	< +/- 0.75	< +/- 1	< +/- 1.25	< +/- 1.75
Pitch (µrad)	< +/- 15	< +/- 20	< +/- 25	< +/- 30	< +/- 40
Yaw (µrad)	< +/- 20

Speed max. (mm/sec)
LM-015	600

Resolution Closed-Loop (µm)
LS-010, Linear steel scale	0.1
LS-020, Linear glass scale	0.005 ... 0.1

Reference mark	center

Winding Constant
Force constant (Nm/Ams)	22
Back EMF constant,( peak value) V/(m/s)**	-
Electrical resistance at 80° (Ohm)**	-
Electrical inductance (mH)*	-
Continuous current at 80° (Ams)	-

Material	Special Aluminium, anodized
Weight (kg)	-	-	-	-	-
Note: =Two point slope correction *=Terminal to terminal

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UPS-150 Base + Motors

Travel ranges	A (mm)	B (mm)	C (mm)	D (mm)
55 mm	151	188	83	27.5
105 mm	201	238	108	52.5
155 mm	251	288	133	77.5
205 mm	301	338	158	102.5
305 mm	401	438	208	152.5

LM-015

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UPS-150 Ordering information

	LM-015	1

	52 mm (2") 102 mm (4") 155 mm (6") 205 mm (8") 305 mm (12")	1 2 3 4 5
	LS-010, Linear steel scale LS-020, Linear glass scale	1 2

	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.