High Precision Linear Positioners - Motorized Stages, Linear Translation Stages, Linear Motion

  • X-Positioning Stages, X-Y Positioning Stages, Z-Positioning Stages, Precision Actuators
These precision linear positioners are designed for precisely controlling linear motion from the micron-level down to the nanometer range in applications from bio-technology to semiconductor technology. A variety of different drive systems and bearings are offered as well as integrated position feedback devices for closed-loop operation down to resolutions in the single-digit nanometer range. The highest performance is guaranteed by air bearing linear and rotary stages.
PI miCos has extensive knowledge in the machining process, the assembly and the selection of components, for high precision and high-stability motion contol applications. PI miCos precision linear positioners can be combined with our vertical positioning stages and precision motorized rotation stages to form multi-axis positioning systems. Talk to our engineers about your application and we will recommend the appropriate technology, from the drive and bearing system to the encoder and matching motion controller.

Most of our positioning systems are also offered in high-vacuum and ultra-high-vacuum configurations. Click here for piezo nano positioners.

Air Bearing Linear Stages, X, XY, Planar

  • Travel: 50 to 1000mm
  • Max. Load:  2 to 800kg
  • Max. Speed: 250mm/sec to 1m/sec
  • Resolution: to 1 nanometer and below
  • Closed-Loop, Linear Encoder
  • Controller Choice

Ultra High Precision Linear Positioner UPM-160

  • Travel: 205 mm
  • Max. Load: 15 kg
  • Max. Speed: 100 mm/sec
  • Max. Resolution: 0.001 μm
  • Repeatability: 0.035 μm uni-directional
                         +/- 0.035 μm bi-directional
  • Linear Encoder: Optional

Ultra High Precision Stage UPS-150

  • Travel: 52 - 305 mm
  • Max. Load: 15 kg
  • Max. Speed: 600 mm/sec
  • Max. Resolution: 0.001 μm
  • Repeatability: 0.015 μm uni-directional
                              +/- 0.025 μm bi-directional
  • Linear Encoder: Optional

High Precision Linear Positioner HPS-170

  • Travel: 52 - 305 mm
  • Max. Load: 35 kg
  • Max. Speed: 90 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.05 μm uni-directional
                              +/- 0.05 μm bi-directional
  • Linear Encoder: Optional

Linear Positioner LS-270

  • Travel: 155 - 1016mm
  • Max. Load: 150 kg
  • Max. Speed: 150 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.05 μm uni-directional
                              +/- 0.04 μm bi-directional
  • Linear Encoder: Optional

Linear Motor Stage LMS-300

  • Travel: 415 - 815 mm
  • Max. Load: 100 kg
  • Max. Speed: 800 mm/sec
  • Max. Resolution: 0.005 μm
  • Repeatability: 0.05 μm uni-directional
                              +/- 0.05 μm bi-directional
  • Linear Encoder: Included

Linear Motor Stage LMS-230

  • Travel: 52 mm
  • Max. Load: 15 kg
  • Max. Speed: 400 mm/sec
  • Max. Resolution: 0.001 μm
  • Repeatability: 0.01 μm uni-directional
                              +/- 0.02 μm bi-directional
  • Linear Encoder: Included

Linear Motor Stage LMS-180

  • Travel: 155 - 508 mm
  • Max. Load: 45 kg
  • Max. Speed: 500 mm/sec
  • Max. Resolution: 0.015 μm
  • Repeatability: 0.05 μm uni-directional
                              +/- 0.1 μm bi-directional
  • Linear Encoder: Included

Linear Positioner LS-180

  • Travel: 155 - 508 mm
  • Max. Load: 100 kg
  • Max. Speed: 200 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.05 μm uni-directional
                              +/- 0.1 μm bi-directional
  • Linear Encoder: Optional

Linear Positioner LMS-120

  • Travel: 40 mm
  • Max. Load: 4 kg
  • Max. Speed: 200 mm/sec
  • Max. Resolution: 0.015 μm
  • Repeatability: 0.03 μm uni-directional
                              +/- 0.05 μm bi-directional
  • Linear Encoder: Included

Linear Stage LS-120

  • Travel: 40 mm
  • Max. Load: 10 kg
  • Max. Speed: 90mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.1 μm uni-directional
                              +/- 0.1 μm bi-directionally
  • Linear Encoder: Optional

Linear Stage LS-110

  • Travel: 26 - 305 mm
  • Max. Load: 10 kg
  • Max. Speed: 90 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.1 μm uni-directional
                              +/- 0.1 μm bi-directional
  • Linear Encoder: Optional

Linear Motor Stage LMS-100

  • Travel: 200 - 1000 mm
  • Max. Load: 20 kg
  • Max. Speed: 500 mm/sec
  • Max. Resolution: 0.015 μm
  • Repeatability: 0.1 μm uni-directional
                              +/- 0.1 μm bi-directional
  • Linear Encoder: Optional

Linear Motor Stage LMS-80

  • Travel: 120 mm
  • Max. Load: 5 kg
  • Max. Speed: 500 mm/sec
  • Max. Resolution: 0.015 μm
  • Repeatability: 0.1 μm uni-directional
                              +/- 0.1 μm bi-directional
  • Linear Encoder: Included

Linear Motor Stage LMS-60

  • Travel: 25 - 65 mm
  • Max. Load: 3 kg
  • Max. Speed: 500 mm/sec
  • Max. Resolution: 0.015 μm
  • Repeatability: 0.1 μm uni-directional
                              +/- 0.1 μm bi-directional
  • Linear Encoder: Included

Precision Linear Stage PLS-85

  • Travel: 26 - 102 mm
  • Max. Load: 10 kg
  • Max. Speed: 100 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.05 μm uni-directional
                              +/- 0.1 μm bi-directional
  • Linear Encoder: Optional

Linear Stage LS-65

  • Travel: 26 - 102 mm
  • Max. Load: 6 kg
  • Max. Speed: 10 mm/sec
  • Max. Resolution: 0.2 μm
  • Repeatability: 0.3 μm uni-directional
                              +/- 5 μm bi-directional
  • Linear Encoder: Not Available

Micro Stage MTS-65

  • Travel: 13 - 52 mm
  • Max. Load: 2 kg
  • Max. Speed: 10 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.1 μm uni-directional
                              +/- 0.2 μm bi-directional
  • Linear Encoder: Optional

Micro Stage MTS-70

  • Travel: 10 mm
  • Max. Load: 2 kg
  • Max. Speed: 8 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.1 μm uni-directional
                              +/- 0.2 μm bi-directional
  • Linear Encoder: Optional

Linear Stage VT-75

  • Travel: 50 - 600mm
  • Max. Load: 5 kg
  • Max. Speed: 100 mm/sec
  • Max. Resolution: 0.4 μm
  • Repeatability: 0.4 μm uni-directional
                              +/- 0.6 μm bi-directional
  • Linear Encoder: Not Available

Linear Stage VT-40

  • Travel: 30 - 100 mm
  • Max. Load: 1 kg
  • Max. Speed: 150 mm/sec
  • Max. Resolution: 0.4 μm
  • Repeatability: 0.4 μm uni-directional
                              +/- 4 μm bi-directional
  • Linear Encoder: Not Available

Translation Stage VT-80

  • Travel: 25 - 300 mm
  • Max. Load: 5 kg
  • Max. Speed: 20 mm/sec
  • Max. Resolution: 0.2 μm
  • Repeatability: 0.4 μm uni-directional
                               +/- 10 μm bi-directional
  • Linear Encoder: Not Available

Linear Stage LS-40

  • Travel: 13 - 52 mm
  • Max. Load: 2 kg
  • Max. Speed: 5 mm/sec
  • Max. Resolution: 0.1 μm
  • Repeatability: 0.1 μm uni-directional
                              +/- 3 μm bi-directional
  • Linear Encoder: Not Available

Micro Stage MT-55

  • Travel: 5 mm
  • Max. Load: 0.8 kg
  • Max. Speed: 1 mm/sec
  • Max. Resolution: 0.2 μm
  • Repeatability: 0.2 μm uni-directional
                              +/- 4 μm bi-directional
  • Linear Encoder: Not Available

X-Y Positioning Stage CS-430

  • Travel: 350 x 300 mm
  • Max. Load: 30 kg
  • Max. Speed: 100 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.1 μm uni-directional
                              +/- 0.1 μm bi-directional
  • Linear Encoder: Optional

XY Positioning Stage MS-8

  • Travel: 205 x 205mm
  • Max. Load: 4 kg
  • Max. Speed: 90 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.25 μm uni-directional
                              +/- 0.5 μm bi-directional
  • Linear Encoder: Optional

XY Scan Stage MS-4

  • Travel: 102 x 102 mm
  • Max. Load: 3 kg
  • Max. Speed: 90 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.25 μm uni-directional
                              +/- 0.5 μm bi-directional
  • Linear Encoder: Optional

XY Scan Stage KT-120

  • Travel: 26 x 26 mm
  • Max. Load: 5 kg
  • Max. Speed: 3.5 mm/sec
  • Max. Resolution: 0.2 μm
  • Repeatability: 2 μm uni-directional
                              +/- 5 μm bi-directional
  • Linear Encoder: Not Available

Nano Precision Vertical Linear Stage NPE-200

  • Travel: 13 mm
  • Max. Load: 30 kg
  • Max. Speed: 0.2 mm/sec
  • Max. Resolution: 0.001 μm
  • Repeatability: 0.04 μm uni-directional
                              +/- 0.4 μm bi-directional
  • Linear Encoder: Optional

Ultra High Precision Vertical Linear Stage UPL-160

  • Travel: 26 mm
  • Max. Load:  30kg
  • Max. Speed: 30 mm/sec
  • Max. Resolution: 0.001 μm
  • Repeatability: 0.03 μm uni-directional
                              +/- 0.035 μm bi-directional
  • Linear Encoder: Optional

Vertical Linear Stage ES-100

  • Travel: 13 - 26 mm
  • Max. Load: 5.5 kg
  • Max. Speed: 20 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.05 μm uni-directional
                              +/- 0.1 μm bi-directional
  • Linear Encoder: Optional

Vertical Linear Stage ES-82

  • Travel: 13 - 26 mm
  • Max. Load: 5.5 kg
  • Max. Speed: 20 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.05 μm uni-directional
                              +/- 0.01 μm bi-directional
  • Linear Encoder: Optional

Vertical Linear Stage ES-70

  • Travel: 6.25 mm
  • Max. Load: 2 kg
  • Max. Speed: 0.1 mm/sec
  • Max. Resolution: 0.3 μm
  • Repeatability: 0.3 μm uni-directional
                              +/- 2 μm bi-directional
  • Linear Encoder: Not Available

Vertical Linear Stage ES-65

  • Travel: 26 mm
  • Max. Load: 2 kg
  • Max. Speed: 20 mm/sec
  • Max. Resolution: 1 μm
  • Repeatability: 5 μm uni-directional
                              +/- 2 μm bi-directional
  • Linear Encoder: Not Available

Micro Linear Actuator MA-35

  • Travel: 52 mm
  • Max. Force: 500 kg
  • Max. Speed: 100 mm/sec
  • Max. Resolution: 0.1 μm
  • Repeatability: 0.2 μm uni-directional
                              +/- 1 μm bi-directional
  • Linear Encoder: Not Available

Micro Linear Actuator MP-20 L

  • Travel: 75 mm
  • Max. Force: 125 N
  • Max. Speed: 3.5 mm/sec
  • Max. Resolution: 0.1 μm
  • Repeatability: 0.3 μm uni-directional
                              +/- 1 μm bi-directional
  • Linear Encoder: Not Available

Micro Linear Actuator MP-20 S

  • Travel: 12.5 mm
  • Max. Force: 20 N
  • Max. Speed: 3 mm/sec
  • Max. Resolution: 0.5 μm
  • Repeatability: 2 μm uni-directional
                              +/- 5 μm bi-directional
  • Linear Encoder: Not Available

Micro Linear Actuator MP-15

  • Travel: 6 - 12.7 mm
  • Max. Force: 10 N
  • Max. Speed: 0.3 mm/sec
  • Max. Resolution: 0.2 μm
  • Repeatability: 0.5 μm uni-directional
                              +/- 10 μm bi-directional
  • Linear Encoder: Not Available