Special Environment Motion
Vacuum Precision Positioning Stages & Systems
PI miCos vacuum-compatible motion systems include linear and rotary stages, nanopositioners, multi-axis systems and hexapods engineered for demanding research and industrial environments.
Precision Motion for Vacuum Environments
Operating precision positioners in vacuum creates challenges including outgassing, contamination and reduced convective cooling. PI miCos developed vacuum-compatible positioning solutions that address these requirements, with many standard positioning products available in vacuum and UHV configurations.
Vacuum-Compatible Materials
Material, lubricant and component choices help reduce outgassing and contamination.
Thermal Management
Motion systems can be configured for environments where conventional air cooling is unavailable.
Multiple Vacuum Levels
Solutions span low-vacuum, high-vacuum and ultra-high-vacuum preparation levels.
Vacuum Preparation Levels
Legacy PI miCos vacuum preparation categories represented on this page are retained below with their original product links.
Looking for Current Vacuum Motion Solutions?
Explore the latest PI precision positioning stages and systems for vacuum applications.