Elevation Piezo Stage EPS-30 by MICOS

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	3.100		Elevation Piezo Stage EPS-30

Key features
	Travel range up to 13 mm
	Piezo driven motor with low hysteresis
	Encoder Resolution 50 nm
	Maximum speed 1 mm/sec
	Load capacity 0.15 kg
	Holding force N
	High precision ball bearings
	Special tempered stainless steel
	Ref. mark at the center of the linear scale

F A C T S
Load Characteristics	Fx (N)	Fy (N)	Fz (N)	Mx (Nm)	My (Nm)	Mz (Nm)	kax (µrad)	kay (µrad)
PM-005	2	2	1.5	0.1	0.15	0.1	250	150

D E S C R I P T I O N

Elevation Piezo Stages EPS-30 are suited for precise positioning of small construction parts. They are ideal for a variety of applications, such as Micro,-Nanotechnology, Bio Technology, Microscopy, Quality control and R&D. Elevation Piezo Stages EPS-30 stages are working in open or closed loop mode. Resolution up to 50 nm are available. The modules can be space-saving assembled to XZ or XYZ -systems with Linear Piezo Stage LPS-30 to XYZ- systems. Elevation Piezo Stages EPS-30 is equipped with prestressed zero-backlash ball bearings. Directly driven with a piezo driven step motor without any backlash. The travel range is 6.5 mm or 13mm. XZ-assembly can only be made with a special mounting adapter and must be ordered ( Order No. 5800-9- 0003 ). Elevation Piezo Stages EPS-30 are specially designed for clean room, vacuum and cryonic applications. Customized designs for OEM is possible.

Technical data
Travel Range (mm)	6.5	13
Bi-directional Repeatability (µm) (closed loop)	+/- 0.1
Uni-directional Repeatability (µm) (closed loop)	+/- 0.05
Accuracy per 5 mm (µm) (LS-010, Linear steel scale)	+/- 1
Velocity Range (mm/sec)	0.001 ... 2
Straightness / Flatness (µm)	+/- 0.3	+/- 0.5
Pitch (µrad)	+/- 30	+/- 60
Yaw (µrad)	+/- 30
Speed max. (mm/sec)	2

PM-005
Resolution Open-Loop (µm)

PM-005	100nm ( HS )
	200nm ( SS )
	400nm ( DS )

Resolution Closed-Loop (µm)
PM-005, LS-010 Linear scale	0.05

Electrical Data
PM-005
Supply voltage	5V ( +/- 10% )
Power Consumption	150 mA
Operating temperature	0° C … 50° C
Scanning frequency	max. 400 KHz
Vibration (50Hz … 2Hz)	< 200 ms-2
Shock (11 ms)	< 400 ms-2

Weight (kg)	0.075	0.080
Material	Stainless steel
Note: (SMC): Micro-Step Mode, (FS): Full-Step 2Phase

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EPS-30 Base & Motors

Travel ranges	A (mm)
6.5 mm	49.5
13 mm	55.5

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LPS-30 Ordering information

Available Options:

Modul combination
Clean room
10-3 mbar up to 10-7 mbar
77K °C (open loop)

	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.