Elevation Stage / Vertical Positioner ES-100 by MICOS

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	2.106		Vertical Elevation Stage ES-100

Key features
	Travel range up to 26 mm
	Maximum speed 20 mm/sec
	Load capacity 5.5 kg
	Higher load on request
	Bi-directional repeatability +/- 0.1µm
	Recirculating ball bearings
	Special, tempered Aluminium
	Limit switches integrated
	Module combination
	3dView

F A C T S
Load Characteristics	Fx (N)	Fy (N)	Fz (N)	Mx (N)	My (Nm)	Mz (Nm)	kax (µrad/Nm)	kay (µrad/Nm)
DC-B-032	100	50	30	40	80	100	60	60
2Phase-044	100	50	55	40	80	100	60	60

D E S C R I P T I O N

This high resolution vertical positioning stage is a compact linear Z-stage for loads to 5.5 kg (13 lbs). The Elevation stage is driven by a precision ground recirculating ball screw with 1mm pitch.
Newly developed crossed-roller bearings guarantee a maximum of rigidity and guiding quality. The motorized Z-Stage is available alternatively with DC- and 2-phase-micro-step (SMC-series) motors. The Z-travel range is 10 mm or 26 mm.
For demanding positioning tasks ES-100 vertical positioning stages can be supplied with a cost-effective linear scale system. Then the operation is running in closed-loop modus. Two mechanical limit switches are integrated in the elevation stage. Additionally we offer contactless limit switches.

Technical data
Travel Range (mm)	13	26
Bi-directional Repeatability (µm)	+/- 0.1 ... 2
Accuracy (µm)	+/- 1 ... 3
Velocity Range (mm/sec)	0.001 ... 20
Straightness / Flatness (µm)	+/- 1	+/- 2
Pitch (µrad)	+/- 100	+/- 150
Yaw (µrad)	+/- 100	+/- 150
Ballscrew Pitch (mm)	1

Speed max. (mm/sec)
DC-B-032	20
2Phase-044	15

Resolution Open-Loop (µm)
2Phase-044	0.2 (SMC) \| 5 (FS)

Resolution Closed-Loop (µm)
RE-010, Rotary encoder feedback	0.5	higher resolution on reqest!
LS-010, Linear steel scale	0.1	higher resolution on reqest!

Current (Amps) / Voltage (Volts)
DC-B-032	2 \| 24
2Phase-044	1.7 \| -

Material	Special Aluminum, black anodized
Weight (kg)	2.4	2.5
Note: (SMC): Micro-Step Mode, (FS): Full-Step 2Phase More info: Detailed information, concerning the motor and connectors, see: Appendix

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ES-100 Base & Motors

Travel range	A (mm)
13 mm	90
26 mm	105

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

ES-100 Ordering information
Elevation Stage			Order-No.
ES-100 1" 2SM HLS			6611-9-2201
ES-100 1" 2SM-LIK21 HLS			6611-9-2211
ES-100 1" DC HLS			6611-9-1201
ES-100 1" DC-LIK21 HLS			6611-9-1211
ES-100 1/2" 2SM HLS			6611-9-2101
ES-100 1/2" 2SM-LIK21 HLS			6611-9-2111
ES-100 1/2" DC HLS			6611-9-1101
ES-100 1/2" DC-LIK21 HLS			6611-9-1111
MOTOR, TRAVEL RANGE
DC 2SM	brush motor stepper motor
1/2" 1"	travel range travel range
Linear Encoder
LIK21		typ: LS-050

	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.