Scan Table MS-4 NEW EDITION by MICOS

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	2.222		Scan Table MS-4

Key features

		XY travel 102x102 mm (4"x 4")

		Clear aperture 100 mm

		Maximum speed 20 mm/sec

		Load capacity 2 kg

		Special, tempered Aluminium

		Limit switches MLS or HLS integrated

F A C T S
Load Characteristics	Fx (N)	Fy (N)	Fz (N)	Mx (N)	My (Nm)	Mz (Nm)	kax (µrad/Nm)	kay (µrad/Nm)
DC-B-031	30	25	50	0.5	0.5	0.5	350	350
2Phase-032	30	30	50	0.5	0.5	0.5	350	350

D E S C R I P T I O N

The NEW Scan Stages MS-4 are employed for industrial test-, respectively inspection systems. Travel ranges XY are 102 x 102 (4" x 4"). Due to the flat structural shape they are suited for tasks of reflected light and transmitted light microscopy. Both Scan Stages MS-4 are provided with a free center hole of diameter 100 mm. Accessories (see accessories) such as adapter for Petri-dishes,

Micro-titer disks and slides are offered. The Scan Stages MS-4 are equipped with recirculating ball screws with little backlash. They guarantee quiet smooth move and good positioning accuracy. All scan stages are fitted out with limit switches. Optionally the Scan Stages MS-4 can be equipped with a length measuring system LS-050.

Technical data
Travel Range (mm)	102 x 102
Bi-directional Repeatability (µm)	+/- 0.2 ... 8
Accuracy per 50 mm (µm)	+/- 0.4 ... 10
Velocity Range (mm/sec)	0.001 ... 90
Ballscrew Pitch (mm)	2

Speed max.(mm/sec)
DC-B-031	90
2Phase-032	35

Resolution Open-Loop (µm)
DC-B-031
2Phase-032	0.1 (SMC) \| 10 (FS)

Resolution Closed-Loop (µm)
RE-020, Rotary encoder feedback	0.1
LS-050, Linear scale	0.1

Current (Amps) / Voltage (Volts)
DC-B-031	1.1 \| 24
2Phase-032	1.2 \| -

Material	Special Aluminium, black anodized
Weight (kg)	3.8
Note: (SMC): Micro-Step Mode, (FS): Full-Step 2Phase More info: Detailed information, concerning the motor and connectors, see: Appendix

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MS-4 Motors

DC-B-031		2Phase-032

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MS-4 Base

Travel ranges

102 x 102 mm

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Scan Table MS-4 Ordering information
Scan Table	Order-No.
MS-4 DC MLS	6315-9-1001
MS-4 DC HLS	6315-9-1002
MS-4 DC LIK21 MLS	6315-9-1011
MS-4 DC LIK21 HLS	6315-9-1012
MS-4 ZSS42 MLS	6315-9-2001
MS-4 ZSS42 HLS	6315-9-2002
MS-4 ZSS42 LIK21 MLS	6315-9-2011
MS-4 ZSS42 LIK21 HLS	6315-9-2012
Note: MLS = Mechanical Limit Switch, HLS = Hall Sensor Limit Switch, LIK21 = LS-050

	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.