Miniature Linear Positioner Micro Stage MTS-65 by MICOS

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	3.012		Micro Stage MTS-65

Key features
	Travel range up to 52 mm (1")
	Maximum speed 10 mm/sec
	Load capacity 3 kg
	Bi-directional repeatability +/-0.2 µm
	Crossed-roller bearings
	Special, tempered Aluminium
	Limit switches integrated
	Module combination

F A C T S
Load Characteristics	Fx (N)	Fy (N)	Fz (N)	Mx (Nm)	My (Nm)	Mz (Nm)	kax (µrad/Nm)	kay (µrad/Nm)
2Phase-020	25	6	30	0.4	1.2	0.5	80	30

D E S C R I P T I O N

The Micro Stage MTS-65 was developed for industrial application with limited space conditions. Typically used for the positioning of laser diodes and optical construction parts. The drive is made by a 2-phase micro stepper motor without gear. The stages of the series MTS-65 are provided with recirculating ball bearings and a ground re-circulating ball screw. Therefore a maximum of stiffness, accuracy and smooth move is guaranteed.
The Micro Stage are standard equipped with two optical limit switches. For need of high positioning accuracy and repeatability (+/- 0.1µm) the Micro Stage MTS-65 are offered with a length measuring system. An optimal performance of the compatibility is achieved by using our SMC controllers. With an special mounting kit, MTS-65 stages can be assembled to XYZ- modules.

Technical data
Travel Range (mm)	13	26	52
Bi-directional Repeatability (µm)	+/- 0.2 ... 2
Accuracy per 10 mm (µm)	+/- 0.6 ... 5
Velocity Range (mm/sec)	0.001 ... 10
Straightness / Flatness (µm)	+/- 0.75	+/- 1.25	+/- 2
Pitch (µrad)	+/- 40	+/- 60	+/- 80
Yaw (µrad)	+/- 40
Ballscrew Pitch (mm)	1

Speed max. (mm/sec)
2Phase-020	10

Resolution Open-Loop (µm)
2Phase-020	0.1 (SMC) \| 5 (FS)		higher resolution on request

Resolution Closed-Loop (µm)
LS-010 Linear steel scale	0.1

Current (Amps) / Voltage (Volts)
2Phase-020	1.2 \| -

Material	Special Alu, black anodized
Weight (kg)	0.4	0.6	0.8

Note: (SMC): Micro-Step Mode, (FS): Full-Step 2Phase

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MTS-65 Motor

	2Phase-020

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MTS-65 Base

Travel ranges	A (mm)	B (mm)	C (mm)	D (mm)
13 mm (1/2")	38.5	80	100	~ 111.6
26 mm (1")	45	93	113	~ 124.6
52 mm (2")	62	105	147	na.

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Micro Stage MTS-65 Ordering information
Micro Stage	Order-No.
MTS-65 2 " ZSS25 HLS	6217-9-2301
MTS-65 2" ZSS25 OLS	6217-9-2303
MTS-65 2" ZSS25 LIK21 HLS	6217-9-2311
MTS-65 2" ZSS25 LIK21 OLS	6217-9-2313
MTS-65 1" ZSS25 HLS	6217-9-2201
MTS-65 1" ZSS25 OLS	6217-9-2203
MTS-65 1" ZSS25 LIK21 HLS	6217-9-2211
MTS-65 1" ZSS25 LIK21 OLS	6217-9-2213
MTS-65 1/2" ZSS25 HLS	6217-9-2101
MTS-65 1/2" ZSS25 OLS	6217-9-2103
MTS-65 1/2" ZSS25 LIK21 HLS	6217-9-2111
MTS-65 1/2" ZSS25 LIK21 OLS	6217-9-2113

Options - MTS-65 Accessories	Order-No.
Monting Tool XY 2"	6217-9-0003
Monting Tool XY 1"	6217-9-0002
Monting Tool XY 1/2"	6217-9-0001

	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.