Miniature Linear Positioner Micro Stage MTS-70 by MICOS

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	3.014		Micro Stage MTS-70

Key features
	Travel range 10 mm
	Maximum speed 10 mm/sec
	Load capacity 3 kg
	Bi-directional repeatability +/-0.2 µm
	Crossed-roller bearings
	Special, tempered Aluminium
	Limit switches integrated
	Module combination

F A C T S
Load Characteristics	Fx (N)	Fy (N)	Fz (N)	Mx (Nm)	My (Nm)	Mz (Nm)	kax (µrad/Nm)	kay (µrad/Nm)
2Phase-020	25	6	30	0.4	1.2	0.5	80	30

D E S C R I P T I O N

The miniature Micro Stage MTS-70 was developed for industrial application with limited space conditions. Typically used for the positioning of laser diodes and optical construction parts. The drive is made by a 2-phase micro stepper motor without gear motor. The micro stages of the series MTS-70 are provided with crossed-roller bearings and a ground recirculating ball screw. Therefore a maximum of stiffness, accuracy and smooth move is guaranteed. The Micro Stages are standard equipped with two limit switches. For need of high positioning accuracy and repeatability (0.1 µm) the Micro Stages MTS-70 are offered with a length measuring system. An optimal performance of the compatibility is achieved by using our SMC or NI controllers.

Technical data
Travel Range (mm)	10
Bi-directional Repeatability (µm)	+/- 0.2 ... 2
Accuracy per 10 mm (µm)	+/- 0.6 ... 5
Velocity Range (mm/sec)	0.001 ... 10
Straightness / Flatness (µm)	+/- 0.75
Pitch (µrad)	+/- 80
Yaw (µrad)	+/- 50
Ballscrew Pitch (mm)	1

Speed max. (mm/sec)
2Phase-020	7

Resolution Open-Loop (µm)
2Phase-020	0.1 (SMC) \| 5 (FS)

Resolution Closed-Loop (µm)
LS-010 Linear steel scale	0.1

Current (Amps) / Voltage (Volts)
2Phase-020	1.2 \| -

Material	Special Alu, black anodized
Weight (kg)	aprox 0.4

Note: (SMC): Micro-Step Mode, (FS): Full-Step 2Phase

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MTS-70 Motor

	2Phase-020

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MTS-70 Base

Travel range

10 mm

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MTS-70 Ordering information

	2Phase-020		2
	2Phase-020		2

		X axis XY axes (setup by MICOS)		1 2

		without LS-010 LS-010, linear steel scale		0 3

	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.