Miniature Linear Positioner Micro Stage MT-60 by MICOS

MT-60 Motors

MOTION CONTROL Systems Positioners MiniP DirectD Control ManP Acces Vacuum MAC PhotonX Moskito Albatros Campus

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	3.001		Micro Stage MT-60

Key features
	Travel range 40 mm
	Recirculating ball screw
	High Resolution up to 0.02216 µm
	Maximum speed 15 mm/sec
	Load capacity 1.5 kg
	Crossed-roller bearings
	Special, tempered Aluminium
	Limit switches integrated
	Module combination
	Download PDF data sheet ...

F A C T S
Load Characteristics	Fx (N)	Fy (N)	Fz (N)	Mx (Nm)	My (Nm)	Mz (Nm)	kax (µrad/Nm)	kay (µrad/Nm)
DC-B-010	7.5	5	15	0.7	1.6	0.7	90	40
2Phase-010	7.5	5	15	0.7	1.6	0.7	90	40
2Phase-025	7.5	5	15	0.7	1.6	0.7	90	40

D E S C R I P T I O N

The Micro Stages MT-60 are suited for precision positioning of small structural elements with longer travel ranges. Typical applications are positioning - inspection equipment in the field of fiber optics and semiconductor technology. With help of mounting plates (see accessories) the stages can be space-saving configured as XY - XYZ assemblies. The Micro Stage MT-60 is equipped with prestressed, zero-backlash crossed roller bearings. A precision ground recirculating ball screw realizes resolutions up to 0.054µm (SMC). Directly driven with a 2-phase-step motor without gear or with DC- and 2-phase-gear motors. Especially significant is the good smooth move and the high resolution of the Micro Stage MT-60. The travel range amounts to 40mm.All Micro Stages are standard equipped with two limit switches.

MT-60 & MP-mini

Technical data
Travel Range (mm)	40
Bi-directional Repeatability (µm)	+/- 2
Uni-directional Repeatability (µm)	+/- 0.2
Accuracy per 5 mm (µm)	+/- 8
Velocity Range (mm/sec)	0.001 ... 15
Straightness / Flatness (µm)	+/- 2.5
Pitch (µrad)	+/- 180
Yaw (µrad)	+/- 180
Ballscrew Pitch (mm)	1

Speed max. (mm/sec)
DC-B-010	3.5
2Phase-010	0.6
2Phase-025	15

Resolution Open-Loop (µm)
2Phase-010	0.054902 (SMC) \| 0.54902 (FS)
2Phase-025	0.1 (SMC) \| 5 (FS)

Resolution Closed-Loop (µm)
RE-005, Rotary encoder feedback	0.02216

Current (Amps) / Voltage (Volts)
DC-B-010	0.32 \| 12
2Phase-010	0.25 \| -
2Phase-025	1.2 \| -

Material	Tempered Aluminium, black anodized
Weight (kg)	0.25

Note: (SMC): Micro-Step Mode, (FS): Full-Step 2Phase

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

MT-60 Base

Travel range

40 mm

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

MT-60 Ordering information

DC-B-010
2Phase-010
2Phase-025

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	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.