Ultra High Precision Rotation Stage UPR-100 by MICOS

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	4.024		Ultra Precision Rotation Stage UPR-100

Key features
	Torque motor
	Free center hole 20 mm diameter
	Repeatability 0.0002°
	Angular scale
	High-precision ball bearings
	Speed up to 360°/sec
	Load up to 3 kg
	Vaccum & Clean room compatibility
	Module combination
	Download PDF data sheet ...

F A C T S
Load Characteristics	Fx (N)	Fz (N)	Mx (Nm)	Mz (Nm) (Peak)	Mz (Nm) (Con.)	ka (µrad/Nm)
TM-030	15	30	5	0.5	0.25	–

D E S C R I P T I O N

Ultra Precision Rotation Stages of the structural series UPR-100 and UPR-160 are employed for dynamical positioning. They are mainly utilized in the field of semiconductor technology, for positioning systems of laser treatment, automation systems and robotic. All Rotation Stages of the structural series UPR are directly driven by a torque motor. Mechanical transmissions become no longer necessary. So, with this better positioning accuracies, higher dynamic accelerations and speeds can be achieved as in case of conventional drive systems. Calibrated, paired angular ball bearings guarantee a high central load capacity without breakdown torque. UPR - Rotation Stages are equipped with angular scale. Resolutions up to 0.0002° are standard offered. The Ultra Precision Rotation Stages are equipped with a contactless limit switch.

Technical data
Rotation Range (°)	360, endless
Worm Gear reduction	–
Accuracy (°)	+/- 0.00552
Repeatability (°)	+/- 0.0002
Reversal Error (°)	–
Velocity Range (°/sec)	0.02 ... 360
Flatness (µm)	+/- 2.5
Eccentricity (µm)	+/- 2.5
Wobble (µrad)	+/- 15

Speed max. (°/sec)
TM-030	360

Resolution Closed-Loop (°)
AE-080, Angular scale (50-times interpolation)	0.0002

Winding Constant
Torque constant (Nm/Ams)	-
Back EMF constant, peak value V/(rads/sec)	-
Electrical resistance at 80° (Ohm)	-
Electrical inductance (mH)	-
Continuous current at 80° (Ams)	-

Material	Special Aluminium, black anodized
Weight (kg)	1.2

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UPR-100 Base & Motors

Rotation range

360°, endless

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UPR-100 Ordering information
Ultra Precision Rotation Stage	Order-No.
UPR-100	6805-9-1111

	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.