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4.030
Ultra Precision Rotation Stage UPR-160 F
             Linear or Rotation Feedback      Torque Motor
 
Key features
Free center hole 35 mm
Torque motor
Repeatability 0.0004°
Angular scale
High-precision ball bearings
Speed up to 360°/sec
Load up to 20 kg
Module combination
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F A C T S            
Load Characteristics
Fx (N) Fz (N) Mx (N) Mz (Nm)
(Peak)
Mz (Nm)
(Con.)
ka (µrad/Nm)
TM-010 80 200 100 5.89 0.97 1.5

 

D E S C R I P T I O N

Rotation Stages of the structural series UPR-160 F and UPR-300 are employed for dynamical positioning. They are mainly utilized in the field of semiconductor technology, for positioning systems of laser treatment, automation systems and robotic. All Rotation Stages of the structural series UPR are directly driven by a torque motor. Mechanical transmissions become no longer necessary. So, with this better positioning accuracy, higher dynamic accelerations and speeds can be achieved as in case of conventional drive systems. Calibrated, paired angular ball bearings guarantee a high central load capacity without breakdown torque. UPR - Rotation Stages are equipped with angular systems. Resolutions up to 0.0004 are standard offered. The Rotation Stages are equipped with a contactless limit switch.

UPR-160 F [detail]

 



 

Technical data
Rotation Range (°)
360, endless
Worm Gear reduction
Accuracy (°)
+/- 0.005552
Repeatability (°)
+/- 0.0002
Reversal Error (°)
Velocity Range (°/sec)
0.02 ... 360
Flatness (µm)
+/- 2.5
Eccentricity (µm)
+/- 2.5
Wobble (µrad)
+/- 15

Speed max. (°/sec)
TM-010
360

Resolution Closed-Loop (°)
AE-050, Angular scale (50-times interpolation)
0.0002

Winding Constant
Torque constant (Nm/Ams)
-
Back EMF constant, peak value V/(rads/sec)
-
Electrical resistance at 80° (Ohm)
-
Electrical inductance (mH)
-
Continuous current at 80° (Ams)
-

Material
Special Aluminium, black anodized
Weight (kg)
6


 

UPR-160 F Base & Motors

Rotation range
360°, endless
 

 

 

UPR-160 F Ordering information  
TM-010
1
   
 
     
       

 

 
Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.
 
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