More Information on Air Bearing Stages, Linear and Rotary
Air
bearing Ultra-Precision-Rotation Stages of
the structural series UPR-100 AIR and UPR-160 AIR are utilized wherever a maximum
of quality concerning running and positioning
accuracy is requested. UPR-100
AIR Rotation Stages are mainly employed for
measuring-, calibrate-, inspection systems
and they are perfectly suited for mask exposition
in semiconductor technologies. All
Rotation Stages UPR-100 AIR are
directly driven by a torque motor. Standard
Rotation Stages
UPR-100 AIR are equipped with angular systems.
Standard resolutions up to 0.0002° can
be achieved. For need of better positioning
accuracies, resolutions Rotation Stages UPR-100 F AIR can
be offered with different angular systems. All
Ultra-Precision-Rotation Stages UPR-100
AIR are equipped with a contactless reference-
and limit switch.