Ultra High Precision Rotation Stage UPR-160 F AIR Bearing / Rotary Positioner by MICOS

MOTION CONTROL Systems Positioners MiniP DirectD Control ManP Acces Vacuum MAC PhotonX Moskito Albatros Campus

	Page
	4.040		Ultra Precision Rotation Stage UPR-160 F AIR Bearing More Information on Precision Air Bearing Rotation and Linear Stages

Key features
	High precision Toroid air bearings (patented 44.01262.4-09)
	Free center hole 28 mm diameter
	High stiffness
	Torque motor
	Flatness < 0.1 µm
	Eccentricity < 0.1 µm
	Wobble < 2.5 µrad
	Repeatability 0.0002°
	Angular scale
	Speed up to 360°/sec
	Load up to 5 kg
	Clean room compatibility
	Download PDF data sheet ...

F A C T S
Load Characteristics	Fx (N)	Fz (N)	Mx (N)	Mz (Nm) (Peak)	Mz (Nm) (Con.)	ka (µrad/Nm)
TM-010	20	50	25	5.89	0.97	–

More Information on Air Bearing Stages, Linear and Rotary

Air-bearing Ultra-Precision-Rotation Stages of the structural series UPR-160 F AIR and UPR-300 AIR are utilized whereever a maximum of quality concerning running and positioning accuracy is requested. UPR-160 F AIR Rotation Stages are mainly employed for measuring-, calibrate-, inspection systems and they are perfectly suited for mask exposition in semiconductor technologies. All Rotation Stages UPR-160 F AIR are directly driven by a torque motor.

A special, new developed Toroid-air bearing (patent applied) guarantees more stiffness. Standard Rotation Stages UPR-160 F AIR are standard equipped with optional angular systems. Standard resolutions up to 0.0002 can be achieved. All Ultra-Precision-Rotation Stages UPR-160 F AIR are equipped with a contactless reference- and limit switch.

Technical data
Rotation Range (°)	360, endless
Worm Gear reduction	–
Accuracy (°)	+/- 0.002776
Repeatability (°)	+/- 0.0002
Reversal Error (°)	–
Velocity Range (°/sec)	0.02 ... 360
Flatness (µm)	+/- 0.05
Eccentricity (µm)	+/- 0.05
Wobble (µrad)	+/- 1.25

Speed max. (°/sec)
TM-010	360

Resolution Closed-Loop (°)
AE-050, Angular scale (50-times interpolation)	0.0002

Winding Constant
Torque constant (Nm/Ams)	-
Back EMF constant, peak value V/(rads/sec)	-
Electrical resistance at 80° (Ohm)	-
Electrical inductance (mH)	-
Continuous current at 80° (Ams)	-

Compressed Air compare DIN ISO 8573-1
Leakage rate (L/min)	19 ... 22
Compressed Air range (bar)	4.5 ... 5.5

Material	Special Aluminium, black anodized
Weight (kg)	6
Note: Flatness < 0.1 µm, Eccentricity < 0.1 µm and Wobble < 2.5 µrad based on bearings (not rotation platform)

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

UPR-160 F AIR Base & Motors

Rotation range

360°, endless

More Information on Precision Rotation Stages

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

UPR-160 F AIR Ordering information
Ultra Precision Rotation Stage		Order-No.
UPR-160 AIR		6825-9-100

Ultra Precision Rotation Stage AIR options		Order-No.
Air Supply compare DIN ISO 8573-1 Compressed Air	Technical data: Particular size .......... Class 1 Contained Oil ........... Class 1 Condensing point .... Class 2-3	K700-4-001
Air Checker	Pressure Sensor with motor disable	7160-9-123

	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.