Ultra High Precision Rotation Stage UPR-300 by MICOS

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	4.050		Ultra Precision Rotation Stage UPR-300

Key features
	Torque motor
	Repeatability 0.0004°
	Angular glass scale
	High-precision ball bearings
	Speed up to 720°/sec
	Load up to 120 kg
	Module combination
	Download PDF data sheet ...

F A C T S
Load Characteristics	Fx (N)	Fz (N)	Mx (Nm)	Mz (Nm) (Peak)	Mz (Nm) (Con.)	ka (µrad/Nm)
TM-020	500	1200	200	93	20	80

D E S C R I P T I O N

Rotation Stages of the structural series
UPR-300 and UPR-160 are employed for dynamical positioning. They are mainly utilized in the field of semiconductor technology, for positioning systems of laser treatment, automation systems and robotic. All Rotation Stages of the structural series UPR are directly driven by a torque motor. Mechanical transmissions become no longer necessary. So with this better positioning accuracies, higher dynamic accelerations and speeds can be achieved as in case of conventional drive systems.

Calibrated, paired angular ball bearings guarantee a high central load capacity without breakdown torque. UPR - Rotation Stages are equipped with optical angular systems. Resolutions up to 0.0002° are standardly offered. For need of better positioning accuracies and larger free center hole additional angular systems are offered. The Rotation Stages are equipped with a contactless limit switch.

Technical data
Rotation Range (°)	360, endless
Worm Gear reduction	–
Accuracy (°)	+/- 0.001388
Repeatability (°)	+/- 0.0002
Reversal Error (°)	–
Velocity Range (°/sec)	0.001 ... 720
Flatness (µm)	+/- 1.5
Eccentricity (µm)	+/- 1.5
Wobble (µrad)	+/- 10

Speed max. (°/sec)
TM-020	720

Resolution Closed-Loop (°)
AE-010, Angular scale (25-times interpolation)	0.0002

Winding Constant
Torque constant (Nm/Ams)	3.33
Back EMF constant, peak value V/(rads/sec)	2.7
Electrical resistance at 80° (Ohm)	1.42
Electrical inductance (mH)	3.23
Continuous current at 80° (Ams)	6.32

Material	Special Aluminium, black anodized
Weight (kg)	26.7

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UPR-300 Base & Motors

Rotation range

360°, endless

TM-020

MOTION CONTROL Systems Positioners MiniPos DirectDrives Controllers ManPos Accessories Vacuum MAC PhotonX M A C

UPR-300 Ordering information


TM-020		1

	Founded in 1990, MICOS specializes in the development, manufacturing and marketing of ultra-high precision positioning components and systems for research and industry. We are experts in vacuum, ultra-high vacuum, clean room, and extreme climate environments down to 77 Kelvin.