Piezo Positioner LPS-65 / N-565: X, X-Y Stage

Key features
  • Different Types of Piezo Motor Positioners
  • X and XY combinations (6 axis on request)
  • Travel: 13, 26 mm and 52 mm
  • Max. Load: 1 kg
  • Max. Speed: 10 mm/sec
  • Encoder Resolution: < 2 nm
  • Repeatability:  to 1 nm                      
  • Linear Encoder: Optional


This low profile piezo positioner is available in X and XY configurations. It can handle loads to 2 kg and is based on a proprietary high-force piezo stepping motor providing nanometer resolution and repeatability in closed loop. Vacuum compatible and non magnetic versions are also offered. The large platform and the cross roller bearings provide excellent guiding precision and smooth, highly accurate motion in the nanometer range with travel ranges of 1/2", 1" and 2". The stage achieves high speed to 10 mm/sec. Customized versions with up to 6 axes in parallel kinematics formation are available on request.

Piezo Positioner Details and Ordering Information


Travel Dependent Specifications
Travel Range (mm) 13 /26 / 52
Weight (kg) 0.3 /0.4/ 0.6
Motor/Feedback Dependent Specifcations
Speed Max (mm/sec) 10
Resolution Typical (µm) 0.001
Bi-directional Repeatability (µm) � 0.001
Uni-directional Repeatability (µm) 0.001
Fx 50
Fy 10
Fz 20
Mx 2.1 Nm
My 1.7 Nm
Mz 2.1 Nm
Motor Type Piezo stepping motor