Piezo Rotation Stage M-660

Key features
  • Travel: 360°, Endless
  • Max. Load: 2.0 kg
  • Max. Speed: 720°/sec
  • Max. Resolution: 0.00023 ° (4 �rad)
  • Repeatability: 24 �rad bi-directional


This low profile piezo rotation stage provides very high accuracy and velocity. It is driven by two ultrasonic piezo motors to provide higher torque and speed. The stage can handle loads to 2 kg. Vacuum compatible versions are available on request. Details, ordering info and additional piezo rotation stages.

Travel Dependent Specifications
Travel Range (Degrees) 360°, Endless
Flatness (µm) n/a
Eccentricity (µm) n/a
Wobble (µrad) n/a
Weight (kg) 0.5
Motor/Feedback Dependent Specifcations
Speed Max 720�/sec
Resolution Typical (�rad) 4 (0.00023 deg)
Bi-directional Repeatability 24 �rad
Uni-directional Repeatability N/A
Fx 10
Fy 10
Fz 5
Mx 0.1
Mz 0.03
Motor Compatibility
Motor Type Ultrasonic Piezo