Piezo Rotation Stage M-660
Key features
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This low profile piezo rotation stage provides very high accuracy and velocity. It is driven by two ultrasonic piezo motors to provide higher torque and speed. The stage can handle loads to 2 kg. Vacuum compatible versions are available on request. Details, ordering info and additional piezo rotation stages.
Travel Range (Degrees) | 360°, Endless |
Flatness (µm) | n/a |
Eccentricity (µm) | n/a |
Wobble (µrad) | n/a |
Weight (kg) | 0.5 |
Speed Max | 720�/sec |
Resolution Typical (�rad) | 4 (0.00023 deg) |
Bi-directional Repeatability | 24 �rad |
Uni-directional Repeatability | N/A |
Fx | 10 |
Fy | 10 |
Fz | 5 |
Mx | 0.1 |
Mz | 0.03 |
Motor Type | Ultrasonic Piezo |