Products & SolutionsSPECIAL ENVIRONMENTSVacuum

VACUUM

Operating a motion system or postioners in vacuum is a design challenge. Issues such as outgassing, contamination and lack of air cooling are complicating the system design. Fortunately, MICOS has developed solutions that address each of these problems. Most of our standard products are available in vacuum compatible versions specified below.

• Vacuum Preparation Levels

	Low-Vacuum to 10-3 torr (LV)
	High-Vacuum to 10-7 torr (HV)
	Ultra-High Vacuum (UHV) to 10-9 torr