Ultra Precision Rotation Stage UPR-160
Key features
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- Technical Description below
This ultra-precision rotary positioner is equipped with a direct-drive torque motor for high speed and resolution. Excellent flatness of motion and concentricity with minimum vibrations are also guaranteed by this design. The absence of gears and provides longer lifetime while eliminating play and backlash. UPR rotation stages can also be equipped with air bearings for even higher precision. Closed-loop operation is provided by use of direct metrology optical encoders.