Linear Piezo Stage LPS-35, Piezo Motor Positioner

Highslide JS
Linear Piezo Stage LPS-35, Piezo Motor Positioner.
Key features
  • Travel: 6.5 - 38 mm
  • Max. Load: 0.8 kg
  • Max. Speed: 0.5 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.03 μm uni-directional
                              +/- 0.05  μm bi-directional
  • Linear Encoder: Optional
  • Piezo Motor Overview: Different Types of Piezo Motors

 

  • Description
  • Specifications
  • Documentation & Part No.

The linear piezo stage LPS- 35 is specifically designed for precise positioning of small components. They are ideal for a variety of applications, such as Micro- , Nano- technology, Bio Technology, Microscopy and R& D. LPS- 35 stage are working in open or closed loop mode, where a resolution of up to 50 nm is available. Due to the principle in open loop there is no repeatability. It is directly driven with an inertial piezo motor without any backlash. The travel range is 6. 5, 13, 26 or 38 mm. mounting the stage to an XY assembly can be made only with a special mounting adapter and must be specified when ordering.


Piezo Positioner Details and Ordering Information

Travel Dependent Specifications
Travel Range (mm) 6.5 13 26 38
Straightness (µm) +/- 3 +/- 5 +/- 8 +/- 10
Flatness (µm) +/- 3 +/- 5 +/- 8 +/- 10
Pitch (µrad) +/- 50 +/- 60 +/- 80 +/- 100
Yaw (µrad) +/- 60 +/- 70 +/- 90 +/- 110
Weight (kg) 0.17 0.2 0.23 0.26
Motor/Feedback Dependent Specifcations
LS-060 LS-035
Speed Max (mm/sec) 0.5
Resolution Calculated (µm) 0.005 0.05
Bi-directional Repeatability (µm) +/- 0.1 +/- 0.05
Uni-directional Repeatability (µm) 0.05 0.03
Accuracy On Request
Fx 4
Fy 2
Fz 8
Mx 0.2
My 0.3
Mz 0.2
Kax 250
Kay 150
Order no.: 5801-9-
Motor        
PM-005 1
Travel        
6.5 mm (1/4") 1
13 mm (1/2") 2
26 mm (1") 3
38 mm (1 1/2") 4
Feedback        
Without linear glass scale 0
LS-060, Linear glass scale 1
LS-035, Linear glass scale 2
       
0