Scan Table MS-4

Key features
  • Travel: 102 x 102 mm
  • Max. Load: 3 kg
  • Max. Speed: 90 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.25 μm uni-directional
                              +/- 0.5 μm bi-directional
  • Linear Encoder: Optional