High Precision Linear Translation Stage HPS-170

Key features
  • Travel: 52 - 305 mm
  • Max. Load: 35 kg
  • Max. Speed: 90 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.05 μm uni-directional
                              +/- 0.05 μm bi-directional
  • Linear Encoder: Optional


This high precision linear positioner is equipped with bellows for dust protection. The HPS-170 precision stage is available with a closed-loop DC servo motor or a 2-phase stepper motor. A stress-relieved, tempered aluminum-alloy, precision-manchined and precision crossed-roller bearings provide high positional stability, stiffness and load capacity. An optional direct metrology linear encoder providing 50 nanometer reslolution is also available.