Z-Positioner / Elevation Stage ES-82

Key features
  • Z-Travel: 13 - 26 mm
  • Max. Vertical Load: 5.5 kg
  • Max. Speed: 20 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.05 μm uni-directional
                              +/- 0.01 μm bi-directional
  • Linear Encoder: Optional

 

  • Precision Elevation Stage
  • Closed-Loop Option
  • For Precision Positioning and Alignment
Travel Dependent Specifications
Travel Range (mm) 13
Straightness (µm) 3
Pitch (µrad) 75
Yaw (µrad) 75
Weight (kg) 0.8
Motor/Feedback Dependent Specifcations
DC (B-009) Stepper (2Ph-010) LS-025
Speed Max (mm/sec) 0.1 0.08
Resolution Calculated (µm) 0.0005004 0.0427015 0.05
Resolution Typical (µm) 0.3 0.3 0.1
Bi-directional Repeatability (µm) 2 2 0.2
Uni-directional Repeatability (µm) 0.3 0.3 0.1
Fx 5 5
Fy 5 5
Fz 20 20
Mx 0.25 0.25
My 0.25 0.25
Mz 0.25 0.25
Order no.: 6613-9-
Motor        
DC-B-009 1
2Phase-010 2
Travel        
13 mm (1/2") 1
Feedback        
without LS-025 0
LS-025, Linear glass scale 1
Screw Pitch/Limit Switch        
HLS-010, Hall limit switches 1