Precision Vertical Linear Stage ES-100 / Z-Positioner

Key features
  • Z-Travel: 13 - 26 mm
  • Max. Vertical Load: 5.5 kg
  • Max. Speed: 20 mm/sec
  • Max. Resolution: 0.05 μm
  • Repeatability: 0.05 μm uni-directional
                              +/- 0.1 μm bi-directional
  • Linear Encoder: Optional

 

Datasheets: Precision Vertical Linear Stages / Precision Z-Motorized Stages

 

Tech Note:
Performance of Direct-Drive Linear Motor Stages in Precision Positioning Applications

 

This vertical linear stage was designed as a stand-alone and also to combine with the LS110 and PRS110 family of translation stages. A stress-relieved, tempered aluminum-alloy, precision-manchined and precision crossed-roller bearings provide high positional stability, stiffness and load capacity. The stage is driven by a precision ball-screw. It comes in 1/2 inch and 1 inch travel ranges. A linear encoder is also available. Tech Note:
Performance, Resolution, and Velocity Control of Stepper Motor-Driven Precision Positioners

 

Tech Note:
Advances in Precision Motorized Positioning Systems: Selection Criteria

 

Tech Note:
Improving Accuracy of Long Travel Linear Positioning Stages with Error Mapping